JPS5658965A - Coating formation method by ion plating - Google Patents

Coating formation method by ion plating

Info

Publication number
JPS5658965A
JPS5658965A JP13409179A JP13409179A JPS5658965A JP S5658965 A JPS5658965 A JP S5658965A JP 13409179 A JP13409179 A JP 13409179A JP 13409179 A JP13409179 A JP 13409179A JP S5658965 A JPS5658965 A JP S5658965A
Authority
JP
Japan
Prior art keywords
substrate
coating
jig
cathode
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13409179A
Other languages
Japanese (ja)
Inventor
Kazuki Aoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elna Co Ltd
Original Assignee
Elna Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elna Co Ltd filed Critical Elna Co Ltd
Priority to JP13409179A priority Critical patent/JPS5658965A/en
Publication of JPS5658965A publication Critical patent/JPS5658965A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To form a coating of good adhesion by performing ion plating while holding an insulating substrate at the earth potential with a substrate holding jig isolated from the cathode. CONSTITUTION:In bell jar 7, substrate holding jig 1 is not use in common with cathode 2 and insulating substrate 3 on jig 1 is held at the earth potential as a body to be vapor-deposited. Namely, substrate 3 is mounted on jig 1, Mo board 5 is fitted to anode 4, and vapor-deposited metal 6 is placed in board 5. Then, bell jar 7, after being evacuated to >=10<-5> Torr., is supplied with Ar gas and held at 10<-2>- 10<-3> Torr. On the other hand, cathode 2 is applied with a negative voltage of several thousands volts to cause glow discharge and electric current is flowed to board 5, which is heated up to vapor metal 6. Then, the vapored metal is ionized by the glow discharge and then accelerated in an electric field to stick to substrate 3, thereby forming a coating. As a result, few electric sparks to substrate 3 are generated, so that the coating of good adhesion can be obtained.
JP13409179A 1979-10-17 1979-10-17 Coating formation method by ion plating Pending JPS5658965A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13409179A JPS5658965A (en) 1979-10-17 1979-10-17 Coating formation method by ion plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13409179A JPS5658965A (en) 1979-10-17 1979-10-17 Coating formation method by ion plating

Publications (1)

Publication Number Publication Date
JPS5658965A true JPS5658965A (en) 1981-05-22

Family

ID=15120209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13409179A Pending JPS5658965A (en) 1979-10-17 1979-10-17 Coating formation method by ion plating

Country Status (1)

Country Link
JP (1) JPS5658965A (en)

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