JPS5659201A - Multilayer reflection preventing film - Google Patents

Multilayer reflection preventing film

Info

Publication number
JPS5659201A
JPS5659201A JP13356179A JP13356179A JPS5659201A JP S5659201 A JPS5659201 A JP S5659201A JP 13356179 A JP13356179 A JP 13356179A JP 13356179 A JP13356179 A JP 13356179A JP S5659201 A JPS5659201 A JP S5659201A
Authority
JP
Japan
Prior art keywords
refractive index
reflection preventing
substance
film
multilayer reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13356179A
Other languages
Japanese (ja)
Other versions
JPH026041B2 (en
Inventor
Yuchi Nakajima
Yoshi Itaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP13356179A priority Critical patent/JPS5659201A/en
Publication of JPS5659201A publication Critical patent/JPS5659201A/en
Publication of JPH026041B2 publication Critical patent/JPH026041B2/ja
Granted legal-status Critical Current

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  • Surface Treatment Of Optical Elements (AREA)

Abstract

PURPOSE: To enhance the reflection preventing effect of a multilayer reflection preventing film for optical parts by forming the higher refractive index layer of the film with a higher refractive index substance and an additive close to the substance in refractive index and vapor deposition temp. to make the layer homogeneous.
CONSTITUTION: The higher refractive index layer of a multilayer reflection preventing film for optical parts is formed by vapor depositing a higher refractive index substance such as ZrO2 (a) and an additive such as TiO2 (b) close to the substance (b) in refractive index and vapor deposition temp. to improve the reflection preventing effect of the film. In this case, the amount of the component (b) used is 2W 20wt% to the amount of the component (a).
COPYRIGHT: (C)1981,JPO&Japio
JP13356179A 1979-10-18 1979-10-18 Multilayer reflection preventing film Granted JPS5659201A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13356179A JPS5659201A (en) 1979-10-18 1979-10-18 Multilayer reflection preventing film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13356179A JPS5659201A (en) 1979-10-18 1979-10-18 Multilayer reflection preventing film

Publications (2)

Publication Number Publication Date
JPS5659201A true JPS5659201A (en) 1981-05-22
JPH026041B2 JPH026041B2 (en) 1990-02-07

Family

ID=15107675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13356179A Granted JPS5659201A (en) 1979-10-18 1979-10-18 Multilayer reflection preventing film

Country Status (1)

Country Link
JP (1) JPS5659201A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011505592A (en) * 2007-11-30 2011-02-24 コーニング インコーポレイテッド Dense and homogeneous fluoride film for DUV device and method for producing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5033212A (en) * 1973-07-23 1975-03-31
JPS5035211A (en) * 1973-08-03 1975-04-03

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5033212A (en) * 1973-07-23 1975-03-31
JPS5035211A (en) * 1973-08-03 1975-04-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011505592A (en) * 2007-11-30 2011-02-24 コーニング インコーポレイテッド Dense and homogeneous fluoride film for DUV device and method for producing the same

Also Published As

Publication number Publication date
JPH026041B2 (en) 1990-02-07

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