JPS56598Y2 - - Google Patents
Info
- Publication number
- JPS56598Y2 JPS56598Y2 JP1978126703U JP12670378U JPS56598Y2 JP S56598 Y2 JPS56598 Y2 JP S56598Y2 JP 1978126703 U JP1978126703 U JP 1978126703U JP 12670378 U JP12670378 U JP 12670378U JP S56598 Y2 JPS56598 Y2 JP S56598Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978126703U JPS56598Y2 (it) | 1978-09-14 | 1978-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978126703U JPS56598Y2 (it) | 1978-09-14 | 1978-09-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5545209U JPS5545209U (it) | 1980-03-25 |
| JPS56598Y2 true JPS56598Y2 (it) | 1981-01-09 |
Family
ID=29088782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978126703U Expired JPS56598Y2 (it) | 1978-09-14 | 1978-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56598Y2 (it) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5866637U (ja) * | 1981-10-29 | 1983-05-06 | 日本真空技術株式会社 | 薄膜形成装置に於ける自公転偏角治具装置 |
-
1978
- 1978-09-14 JP JP1978126703U patent/JPS56598Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5545209U (it) | 1980-03-25 |