JPS5661126A - Table for fixing substrate - Google Patents

Table for fixing substrate

Info

Publication number
JPS5661126A
JPS5661126A JP13724779A JP13724779A JPS5661126A JP S5661126 A JPS5661126 A JP S5661126A JP 13724779 A JP13724779 A JP 13724779A JP 13724779 A JP13724779 A JP 13724779A JP S5661126 A JPS5661126 A JP S5661126A
Authority
JP
Japan
Prior art keywords
substrate
fixing table
constitution
electrodes
static electricity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13724779A
Other languages
Japanese (ja)
Inventor
Tsunetoshi Arikado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP13724779A priority Critical patent/JPS5661126A/en
Publication of JPS5661126A publication Critical patent/JPS5661126A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE:To tightly contact a substrate to a dielectric film provided on a substrate fixing table by static electricity caused by friction. CONSTITUTION:A high frequency power source 3 is connected between electrodes 1 and 2. The electrodes 2 also serves as the substrate fixing table, and is cooled by water. A polyester film 5 is contacted on the electrode 2. The static electricity is generated by rubbing the film 5 with a piece of gauze, thereby the Si substrate 6 is electrostatically contacted tightly. In this constitution, the substrate 6 can be fixed to the fixing table without expensive auxiliary devices, and the etching can be uniformly performed under the sufficiently cooled state.
JP13724779A 1979-10-24 1979-10-24 Table for fixing substrate Pending JPS5661126A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13724779A JPS5661126A (en) 1979-10-24 1979-10-24 Table for fixing substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13724779A JPS5661126A (en) 1979-10-24 1979-10-24 Table for fixing substrate

Publications (1)

Publication Number Publication Date
JPS5661126A true JPS5661126A (en) 1981-05-26

Family

ID=15194201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13724779A Pending JPS5661126A (en) 1979-10-24 1979-10-24 Table for fixing substrate

Country Status (1)

Country Link
JP (1) JPS5661126A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6687969B1 (en) * 1997-05-16 2004-02-10 Micron Technology, Inc. Methods of fixturing flexible substrates and methods of processing flexible substrates

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6687969B1 (en) * 1997-05-16 2004-02-10 Micron Technology, Inc. Methods of fixturing flexible substrates and methods of processing flexible substrates

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