JPS5662329A - Conveying direction turning device for semiconductor wafer - Google Patents

Conveying direction turning device for semiconductor wafer

Info

Publication number
JPS5662329A
JPS5662329A JP13781579A JP13781579A JPS5662329A JP S5662329 A JPS5662329 A JP S5662329A JP 13781579 A JP13781579 A JP 13781579A JP 13781579 A JP13781579 A JP 13781579A JP S5662329 A JPS5662329 A JP S5662329A
Authority
JP
Japan
Prior art keywords
section
semiconductor wafer
conveying
turned
conveying direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13781579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6318325B2 (2
Inventor
Kensho Kyoto
Tatsumi Suganuma
Terumi Rokushiya
Junichi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13781579A priority Critical patent/JPS5662329A/ja
Publication of JPS5662329A publication Critical patent/JPS5662329A/ja
Publication of JPS6318325B2 publication Critical patent/JPS6318325B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W95/00—Packaging processes not covered by the other groups of this subclass

Landscapes

  • Feeding Of Articles To Conveyors (AREA)
JP13781579A 1979-10-26 1979-10-26 Conveying direction turning device for semiconductor wafer Granted JPS5662329A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13781579A JPS5662329A (en) 1979-10-26 1979-10-26 Conveying direction turning device for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13781579A JPS5662329A (en) 1979-10-26 1979-10-26 Conveying direction turning device for semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS5662329A true JPS5662329A (en) 1981-05-28
JPS6318325B2 JPS6318325B2 (2) 1988-04-18

Family

ID=15207496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13781579A Granted JPS5662329A (en) 1979-10-26 1979-10-26 Conveying direction turning device for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5662329A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6376722U (2) * 1986-11-04 1988-05-21
JP2008149491A (ja) * 2006-12-14 2008-07-03 Seiken Graphics Kk 刷版加工装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50126175A (2) * 1974-03-22 1975-10-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50126175A (2) * 1974-03-22 1975-10-03

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6376722U (2) * 1986-11-04 1988-05-21
JP2008149491A (ja) * 2006-12-14 2008-07-03 Seiken Graphics Kk 刷版加工装置

Also Published As

Publication number Publication date
JPS6318325B2 (2) 1988-04-18

Similar Documents

Publication Publication Date Title
JPS56142629A (en) Vacuum device
GB1004222A (en) Improvements in or relating to separating mechanism in or for mixture separating apparatus
ATE25836T1 (de) Foerdervorrichtung.
ES8101851A1 (es) Perfeccionamientos en dispositivos para cortar bloques de barquillos
JPS5662329A (en) Conveying direction turning device for semiconductor wafer
GB1208969A (en) Improvements in or relating to sheet conveying device in folding apparatus
EP0062618A3 (en) Belt conveyor device, particularly for conveying elongate articles arranged transverse the direction of conveyance
JPS5691427A (en) Device for processing semiconductor substrate
JPS51139064A (en) Belt conveyor device which transports the goods while overturning them upside down
DE50008490D1 (de) Anlegetisch
JPS528397A (en) Treatment of insufficient lots in a conveyor line for conveying many k inds of materials of small lots
JPS53133880A (en) Damper operating apparatus for reconance conveyor
JPS571112A (en) Grain conveyor
GB1229001A (2)
JPS5790356A (en) Sheet sorter
JPS5323491A (en) Egg conveying apparatus
GB1092833A (en) Improvements in or relating to apparatus for feeding timber
JPS5334281A (en) Belt type device for conveying cards
JPS5227185A (en) Device for conveying capsules
GB1335457A (en) Device for simultaneously rotating and conveying articles
JPS5790305A (en) Conveying device
GB846656A (en) Improvements in or relating to belt conveyors
ES8201727A1 (es) Perfeccionamientos en los dispositivos de impulsion de con- juntos de bandas transportadoras
JPS51139068A (en) Wooden products conyeying device
JPS53109370A (en) Aligning device