JPS5663106A - Negative pressure actuator - Google Patents
Negative pressure actuatorInfo
- Publication number
- JPS5663106A JPS5663106A JP13748079A JP13748079A JPS5663106A JP S5663106 A JPS5663106 A JP S5663106A JP 13748079 A JP13748079 A JP 13748079A JP 13748079 A JP13748079 A JP 13748079A JP S5663106 A JPS5663106 A JP S5663106A
- Authority
- JP
- Japan
- Prior art keywords
- negative pressure
- driving shaft
- pressure chamber
- introducing
- bellow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Actuator (AREA)
Abstract
PURPOSE: To easily control the three-stage positions of a driving shaft by controlling the negative pressure of two negative pressure sources.
CONSTITUTION: The first negative pressure chamber 3 is made up of the first bellow diaphragm 2 and a box 1a, the second negative pressure chamber 9 is made up of the second bellow diaphragm 8 and the first bellow diaphragm 2, and a driving shaft 15 is fixed to the second bellow flame 8. Thus, the driving shaft 15 can be controlled three-stepwise its position by introducing a negative pressure to the negative pressure chamber 9 through a negative pressure inlet pipe 11, introducing a negative pressure into the first negative pressure chamber through a negative pressure inlet pipe 4, or introducing a negative pressure concurrently into both the first and second negative pressure chamber 3 and 9, so that the position of the driving shaft can be easily controlled.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13748079A JPS5663106A (en) | 1979-10-23 | 1979-10-23 | Negative pressure actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13748079A JPS5663106A (en) | 1979-10-23 | 1979-10-23 | Negative pressure actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5663106A true JPS5663106A (en) | 1981-05-29 |
Family
ID=15199605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13748079A Pending JPS5663106A (en) | 1979-10-23 | 1979-10-23 | Negative pressure actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5663106A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5166566A (en) * | 1988-06-01 | 1992-11-24 | Arthur Pfeiffer Vakuumtechnik Gmbh | Magnetic bearings for a high speed rotary vacuum pump |
| CN106489031A (en) * | 2014-07-10 | 2017-03-08 | 大丰工业株式会社 | Actuator |
-
1979
- 1979-10-23 JP JP13748079A patent/JPS5663106A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5166566A (en) * | 1988-06-01 | 1992-11-24 | Arthur Pfeiffer Vakuumtechnik Gmbh | Magnetic bearings for a high speed rotary vacuum pump |
| CN106489031A (en) * | 2014-07-10 | 2017-03-08 | 大丰工业株式会社 | Actuator |
| CN106489031B (en) * | 2014-07-10 | 2018-11-16 | 大丰工业株式会社 | actuator |
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