JPS5664509A - Surface elastic wave element - Google Patents

Surface elastic wave element

Info

Publication number
JPS5664509A
JPS5664509A JP16617879A JP16617879A JPS5664509A JP S5664509 A JPS5664509 A JP S5664509A JP 16617879 A JP16617879 A JP 16617879A JP 16617879 A JP16617879 A JP 16617879A JP S5664509 A JPS5664509 A JP S5664509A
Authority
JP
Japan
Prior art keywords
wave element
elastic wave
surface elastic
resist
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16617879A
Other languages
Japanese (ja)
Inventor
Arata Doi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
Original Assignee
Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority to JP16617879A priority Critical patent/JPS5664509A/en
Publication of JPS5664509A publication Critical patent/JPS5664509A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02874—Means for compensation or elimination of undesirable effects of direct coupling between input and output transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To reduce the insertion loss of the surface elastic wave element, by burying the comb-line electrode within the hollow part of the piezoelectric substrate. CONSTITUTION:The resist 3 is applied to the quartz plate 1 to form a recess part on the plate 1. Then the aluminum 21 is buried through vapor deposition so as to just fill the recess part. After this, the resist 3 is deleted to remove the aluminum 20 on the resist 3, and then the aluminum is buried into the recess part of the plate 1. Thus a surface elastic wave element is obtained with a comb-line electrode formed. The electric line of force affects effectively and directly the electric field for said wave element, thus enhancing the converting efficiency of energy.
JP16617879A 1979-12-20 1979-12-20 Surface elastic wave element Pending JPS5664509A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16617879A JPS5664509A (en) 1979-12-20 1979-12-20 Surface elastic wave element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16617879A JPS5664509A (en) 1979-12-20 1979-12-20 Surface elastic wave element

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP10879375A Division JPS5232650A (en) 1975-09-08 1975-09-08 Surface elastic wave element

Publications (1)

Publication Number Publication Date
JPS5664509A true JPS5664509A (en) 1981-06-01

Family

ID=15826516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16617879A Pending JPS5664509A (en) 1979-12-20 1979-12-20 Surface elastic wave element

Country Status (1)

Country Link
JP (1) JPS5664509A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6465930B1 (en) * 1998-05-29 2002-10-15 Thomson-Csf Transducer with surface acoustic waves with low gap
WO2007080734A1 (en) 2006-01-11 2007-07-19 Murata Manufacturing Co., Ltd. Method for manufacturing surface acoustic wave device and surface acoustic wave device
US7626313B2 (en) 2006-07-05 2009-12-01 Murata Manufacturing Co., Ltd. Surface acoustic wave device
CN107567682A (en) * 2014-12-17 2018-01-09 Qorvo美国公司 Plate wave device with wave confinement structure and fabrication method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50110585A (en) * 1974-02-06 1975-08-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50110585A (en) * 1974-02-06 1975-08-30

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6465930B1 (en) * 1998-05-29 2002-10-15 Thomson-Csf Transducer with surface acoustic waves with low gap
WO2007080734A1 (en) 2006-01-11 2007-07-19 Murata Manufacturing Co., Ltd. Method for manufacturing surface acoustic wave device and surface acoustic wave device
EP1973228A4 (en) * 2006-01-11 2010-06-02 Murata Manufacturing Co SURFACE ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
US8261418B2 (en) 2006-01-11 2012-09-11 Murata Manufacturing Co., Ltd. Method for manufacturing surface acoustic wave device
US7626313B2 (en) 2006-07-05 2009-12-01 Murata Manufacturing Co., Ltd. Surface acoustic wave device
CN107567682A (en) * 2014-12-17 2018-01-09 Qorvo美国公司 Plate wave device with wave confinement structure and fabrication method
JP2018506930A (en) * 2014-12-17 2018-03-08 コルボ ユーエス インコーポレイテッド Plate wave device having wave confinement structure and fabrication method
CN107567682B (en) * 2014-12-17 2021-01-22 Qorvo美国公司 Plate wave device with wave confinement structure and method of manufacture
US11476827B2 (en) 2014-12-17 2022-10-18 Qorvo Us, Inc. Multi-frequency guided wave devices and fabrication methods
US11545955B2 (en) 2014-12-17 2023-01-03 Qorvo Us, Inc. Plate wave devices with wave confinement structures and fabrication methods

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