JPS5665657A - Method and device for coating body surface with material - Google Patents

Method and device for coating body surface with material

Info

Publication number
JPS5665657A
JPS5665657A JP14558180A JP14558180A JPS5665657A JP S5665657 A JPS5665657 A JP S5665657A JP 14558180 A JP14558180 A JP 14558180A JP 14558180 A JP14558180 A JP 14558180A JP S5665657 A JPS5665657 A JP S5665657A
Authority
JP
Japan
Prior art keywords
body surface
coating body
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14558180A
Other languages
English (en)
Other versions
JPS6362266B2 (ja
Inventor
Perii Ooshiyunits Kurisutofuaa
Ee Hachitaru Debitsuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Biosystems Inc
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of JPS5665657A publication Critical patent/JPS5665657A/ja
Publication of JPS6362266B2 publication Critical patent/JPS6362266B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Special Spraying Apparatus (AREA)
JP14558180A 1979-10-18 1980-10-17 Method and device for coating body surface with material Granted JPS5665657A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8584479A 1979-10-18 1979-10-18

Publications (2)

Publication Number Publication Date
JPS5665657A true JPS5665657A (en) 1981-06-03
JPS6362266B2 JPS6362266B2 (ja) 1988-12-01

Family

ID=22194326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14558180A Granted JPS5665657A (en) 1979-10-18 1980-10-17 Method and device for coating body surface with material

Country Status (4)

Country Link
EP (1) EP0027536B1 (ja)
JP (1) JPS5665657A (ja)
CA (1) CA1152230A (ja)
DE (1) DE3070212D1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008536669A (ja) * 2005-04-22 2008-09-11 シュミット テクノロジー システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング 均等な薄い液体層を基板に塗布する装置および方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0203931B1 (en) * 1984-10-29 1989-03-29 AT&T Corp. Method of producing devices using nonplanar lithography
EP1182292A1 (en) * 2000-08-16 2002-02-27 The Procter & Gamble Company Apparatus for cleaning and refreshing fabrics with an improved ultrasonic nebulizer, and improved ultrasonic nebulizer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008536669A (ja) * 2005-04-22 2008-09-11 シュミット テクノロジー システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング 均等な薄い液体層を基板に塗布する装置および方法

Also Published As

Publication number Publication date
DE3070212D1 (en) 1985-03-28
EP0027536A3 (en) 1982-02-17
EP0027536B1 (en) 1985-02-20
CA1152230A (en) 1983-08-16
JPS6362266B2 (ja) 1988-12-01
EP0027536A2 (en) 1981-04-29

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