JPS5665657A - Method and device for coating body surface with material - Google Patents
Method and device for coating body surface with materialInfo
- Publication number
- JPS5665657A JPS5665657A JP14558180A JP14558180A JPS5665657A JP S5665657 A JPS5665657 A JP S5665657A JP 14558180 A JP14558180 A JP 14558180A JP 14558180 A JP14558180 A JP 14558180A JP S5665657 A JPS5665657 A JP S5665657A
- Authority
- JP
- Japan
- Prior art keywords
- body surface
- coating body
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 title 1
- 238000000576 coating method Methods 0.000 title 1
- 239000000463 material Substances 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Special Spraying Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US8584479A | 1979-10-18 | 1979-10-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5665657A true JPS5665657A (en) | 1981-06-03 |
| JPS6362266B2 JPS6362266B2 (ja) | 1988-12-01 |
Family
ID=22194326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14558180A Granted JPS5665657A (en) | 1979-10-18 | 1980-10-17 | Method and device for coating body surface with material |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0027536B1 (ja) |
| JP (1) | JPS5665657A (ja) |
| CA (1) | CA1152230A (ja) |
| DE (1) | DE3070212D1 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008536669A (ja) * | 2005-04-22 | 2008-09-11 | シュミット テクノロジー システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 均等な薄い液体層を基板に塗布する装置および方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0203931B1 (en) * | 1984-10-29 | 1989-03-29 | AT&T Corp. | Method of producing devices using nonplanar lithography |
| EP1182292A1 (en) * | 2000-08-16 | 2002-02-27 | The Procter & Gamble Company | Apparatus for cleaning and refreshing fabrics with an improved ultrasonic nebulizer, and improved ultrasonic nebulizer |
-
1980
- 1980-08-29 CA CA000359301A patent/CA1152230A/en not_active Expired
- 1980-09-10 EP EP80105418A patent/EP0027536B1/en not_active Expired
- 1980-09-10 DE DE8080105418T patent/DE3070212D1/de not_active Expired
- 1980-10-17 JP JP14558180A patent/JPS5665657A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008536669A (ja) * | 2005-04-22 | 2008-09-11 | シュミット テクノロジー システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 均等な薄い液体層を基板に塗布する装置および方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3070212D1 (en) | 1985-03-28 |
| EP0027536A3 (en) | 1982-02-17 |
| EP0027536B1 (en) | 1985-02-20 |
| CA1152230A (en) | 1983-08-16 |
| JPS6362266B2 (ja) | 1988-12-01 |
| EP0027536A2 (en) | 1981-04-29 |
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