JPS5670450A - Humidity sensor - Google Patents

Humidity sensor

Info

Publication number
JPS5670450A
JPS5670450A JP14841679A JP14841679A JPS5670450A JP S5670450 A JPS5670450 A JP S5670450A JP 14841679 A JP14841679 A JP 14841679A JP 14841679 A JP14841679 A JP 14841679A JP S5670450 A JPS5670450 A JP S5670450A
Authority
JP
Japan
Prior art keywords
humidity detecting
film
layer
thermal characteristics
temperature compensation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14841679A
Other languages
Japanese (ja)
Inventor
Akihiko Yoshida
Atsushi Nishino
Katsuyuki Fujito
Takehiko Unokuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14841679A priority Critical patent/JPS5670450A/en
Publication of JPS5670450A publication Critical patent/JPS5670450A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Air Conditioning Control Device (AREA)

Abstract

PURPOSE: To eliminate the delay in time of the follow-up of temperature compensation by using a humidity detecting element and an element for temperature compensation having the same thermal characteristics with those of the former element as a pair.
CONSTITUTION: In the intermediate part of a U-shaped tantalum wire 32 is formed a tantalum oxide film 33 and on a part, at least, of this film 33 is formed a manganese dioxide layer 35 in such a manner that is contacts with and covers the film 33. On this layer 34, a steam-transmitting and electroconductive facing electrode 35, such as silver paint and carbon, and a solder layer 34 are formed and further one piece of the U-shaped device is coated with waterproof resin 37 such as silicone, whereby the humidity sensor using the humidity detecting element of a changing electrostatic capacity type is manufactured. In this case, a part between a drawn-out lead 39 and a common lead 38 has a temperature-humidity detecting function and the thermal characteristics of both leads are quite the same.
COPYRIGHT: (C)1981,JPO&Japio
JP14841679A 1979-11-15 1979-11-15 Humidity sensor Pending JPS5670450A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14841679A JPS5670450A (en) 1979-11-15 1979-11-15 Humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14841679A JPS5670450A (en) 1979-11-15 1979-11-15 Humidity sensor

Publications (1)

Publication Number Publication Date
JPS5670450A true JPS5670450A (en) 1981-06-12

Family

ID=15452295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14841679A Pending JPS5670450A (en) 1979-11-15 1979-11-15 Humidity sensor

Country Status (1)

Country Link
JP (1) JPS5670450A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6141836A (en) * 1984-07-31 1986-02-28 Sanyo Electric Co Ltd Ultra-sonic humidifier
JPS6488145A (en) * 1987-09-30 1989-04-03 Canon Kk Humidity measuring instrument
JP2003028824A (en) * 2001-07-16 2003-01-29 Denso Corp Capacitive humidity sensor
WO2016181535A1 (en) * 2015-05-13 2016-11-17 三菱電機株式会社 Humidification device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5235690A (en) * 1975-09-16 1977-03-18 Toshiba Corp Temperature compensating circuit and circuit for same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5235690A (en) * 1975-09-16 1977-03-18 Toshiba Corp Temperature compensating circuit and circuit for same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6141836A (en) * 1984-07-31 1986-02-28 Sanyo Electric Co Ltd Ultra-sonic humidifier
JPS6488145A (en) * 1987-09-30 1989-04-03 Canon Kk Humidity measuring instrument
JP2003028824A (en) * 2001-07-16 2003-01-29 Denso Corp Capacitive humidity sensor
WO2016181535A1 (en) * 2015-05-13 2016-11-17 三菱電機株式会社 Humidification device
JPWO2016181535A1 (en) * 2015-05-13 2017-07-27 三菱電機株式会社 Humidifier

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