JPS5672170A - Vacuum vapor depositing device - Google Patents
Vacuum vapor depositing deviceInfo
- Publication number
- JPS5672170A JPS5672170A JP14823979A JP14823979A JPS5672170A JP S5672170 A JPS5672170 A JP S5672170A JP 14823979 A JP14823979 A JP 14823979A JP 14823979 A JP14823979 A JP 14823979A JP S5672170 A JPS5672170 A JP S5672170A
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- onto
- substrate
- recording medium
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000151 deposition Methods 0.000 title 1
- 238000001816 cooling Methods 0.000 abstract 5
- 238000001704 evaporation Methods 0.000 abstract 5
- 230000008020 evaporation Effects 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000007740 vapor deposition Methods 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000696 magnetic material Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 238000005192 partition Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
PURPOSE: To produce a magnetic recording medium of a characteristic more superior than the conventional, by putting two evaporation sources under the cylindrical cooling can through a shield plate and by performing vapor deposition obliquely from one evaporation source, in case that a ground layer, a protection layer, and a magnetic layer are vapordeposited onto the high molecular substrate to produce the magnetic recording medium.
CONSTITUTION: Cylindrical cooling can 25 is put in vacuum vessel 21, and upper room 22 of a low degree of evacuation and lower room 23 of a high degree of evacuation are partitioned above and below can 25 respectively by partition plate 27. Flexible substrate 24 of high molecular materials is moved along the can face by rotating of cooling can 25. Evaporation sources 29 and 210 are arranged under cooling can 25 through shield plate 28. The protection layer, the ground layer, or the intermediate layer consisting of Cr, Al, Ti, Cu, SiO, SiO2 and so on are vapor deposited onto substrate 24 from evaporation source 210. From evaporation source 29, magnetic materials with Co, Ni, Fe and so on as main components are vapor deposited obliquely onto the substrate, which is moved along cooling can 25, by mask 211. Thus, a magnetic recording medium superior in durability and adhesion can be produced without contact of the vapor deposition face onto the guide roller and so on.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14823979A JPS6045271B2 (en) | 1979-11-14 | 1979-11-14 | Vacuum deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14823979A JPS6045271B2 (en) | 1979-11-14 | 1979-11-14 | Vacuum deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5672170A true JPS5672170A (en) | 1981-06-16 |
| JPS6045271B2 JPS6045271B2 (en) | 1985-10-08 |
Family
ID=15448349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14823979A Expired JPS6045271B2 (en) | 1979-11-14 | 1979-11-14 | Vacuum deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6045271B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5857631A (en) * | 1981-09-30 | 1983-04-05 | Sekisui Chem Co Ltd | Production of magnetic recording medium |
| DE10354090A1 (en) * | 2003-11-10 | 2005-06-30 | Creavac-Creative Vakuumbeschichtung Gmbh | Shielded ribbon cable for electrical applications comprises electrical conductors arranged in a casing as insulator made from extruded plastic, and a screen formed as a vaporized layer made from an electrically conducting material |
-
1979
- 1979-11-14 JP JP14823979A patent/JPS6045271B2/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5857631A (en) * | 1981-09-30 | 1983-04-05 | Sekisui Chem Co Ltd | Production of magnetic recording medium |
| DE10354090A1 (en) * | 2003-11-10 | 2005-06-30 | Creavac-Creative Vakuumbeschichtung Gmbh | Shielded ribbon cable for electrical applications comprises electrical conductors arranged in a casing as insulator made from extruded plastic, and a screen formed as a vaporized layer made from an electrically conducting material |
| DE10354090B4 (en) * | 2003-11-10 | 2009-01-08 | Creavac-Creative Vakuumbeschichtung Gmbh | Device for coating ribbon cable |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6045271B2 (en) | 1985-10-08 |
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