JPS5676033U - - Google Patents
Info
- Publication number
- JPS5676033U JPS5676033U JP15837079U JP15837079U JPS5676033U JP S5676033 U JPS5676033 U JP S5676033U JP 15837079 U JP15837079 U JP 15837079U JP 15837079 U JP15837079 U JP 15837079U JP S5676033 U JPS5676033 U JP S5676033U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Drying Of Semiconductors (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15837079U JPS607792Y2 (ja) | 1979-11-15 | 1979-11-15 | マスフロ−コントロ−ラー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15837079U JPS607792Y2 (ja) | 1979-11-15 | 1979-11-15 | マスフロ−コントロ−ラー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5676033U true JPS5676033U (ja) | 1981-06-20 |
| JPS607792Y2 JPS607792Y2 (ja) | 1985-03-16 |
Family
ID=29669618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15837079U Expired JPS607792Y2 (ja) | 1979-11-15 | 1979-11-15 | マスフロ−コントロ−ラー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS607792Y2 (ja) |
-
1979
- 1979-11-15 JP JP15837079U patent/JPS607792Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS607792Y2 (ja) | 1985-03-16 |