JPS5681103A - Control of operation of cold trap - Google Patents

Control of operation of cold trap

Info

Publication number
JPS5681103A
JPS5681103A JP15690679A JP15690679A JPS5681103A JP S5681103 A JPS5681103 A JP S5681103A JP 15690679 A JP15690679 A JP 15690679A JP 15690679 A JP15690679 A JP 15690679A JP S5681103 A JPS5681103 A JP S5681103A
Authority
JP
Japan
Prior art keywords
purity
computer
flow rate
value
deviation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15690679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140441B2 (2
Inventor
Tadashi Goto
Hideaki Abe
Akira Suzuoki
Masatake Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15690679A priority Critical patent/JPS5681103A/ja
Publication of JPS5681103A publication Critical patent/JPS5681103A/ja
Publication of JPS6140441B2 publication Critical patent/JPS6140441B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Manufacture And Refinement Of Metals (AREA)
JP15690679A 1979-12-05 1979-12-05 Control of operation of cold trap Granted JPS5681103A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15690679A JPS5681103A (en) 1979-12-05 1979-12-05 Control of operation of cold trap

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15690679A JPS5681103A (en) 1979-12-05 1979-12-05 Control of operation of cold trap

Publications (2)

Publication Number Publication Date
JPS5681103A true JPS5681103A (en) 1981-07-02
JPS6140441B2 JPS6140441B2 (2) 1986-09-09

Family

ID=15637969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15690679A Granted JPS5681103A (en) 1979-12-05 1979-12-05 Control of operation of cold trap

Country Status (1)

Country Link
JP (1) JPS5681103A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58151403U (ja) * 1982-04-02 1983-10-11 三菱重工業株式会社 含有蒸気除去装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58151403U (ja) * 1982-04-02 1983-10-11 三菱重工業株式会社 含有蒸気除去装置

Also Published As

Publication number Publication date
JPS6140441B2 (2) 1986-09-09

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