JPS568723A - Transporting vehicle - Google Patents

Transporting vehicle

Info

Publication number
JPS568723A
JPS568723A JP8137579A JP8137579A JPS568723A JP S568723 A JPS568723 A JP S568723A JP 8137579 A JP8137579 A JP 8137579A JP 8137579 A JP8137579 A JP 8137579A JP S568723 A JPS568723 A JP S568723A
Authority
JP
Japan
Prior art keywords
receiving
materials
guide line
transporting vehicle
receiving hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8137579A
Other languages
Japanese (ja)
Inventor
Hiroto Nagatomo
Tetsuya Takagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8137579A priority Critical patent/JPS568723A/en
Publication of JPS568723A publication Critical patent/JPS568723A/en
Pending legal-status Critical Current

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  • Intermediate Stations On Conveyors (AREA)

Abstract

PURPOSE: To positively prevent materials to be transported from the deposition of dust thereon by providing a box-line portion for receiving said materials and spraying clear air to said materials through a purifier in a transporting vehicle travelling automatically while detecting a guide line.
CONSTITUTION: A transporting vehicle consists of the lower bed portion 16 and the upper receiving one 17, the former detecting a guide line provided on floor through a sensor not shown and being controlled to travel along the guide line. On the other hand, the receiving portion 17 has a receiving hole 20 provided on both ends with an entrance 19, and two rows of belt conveyers 21, 21 provided below said receiving hole for supplying and receiving works 18. To spray always clear air to these works 18 (for example cartridges 26 receiving a plurality of wafers 25 in semiconductor industry), a purifying mechanism 29 consisting of a fan 31 and filters 32, 33 is provided above the receiving hole 20. Also, the entrance 19 is provided with a door opening and closing freely for preventing intrusion of dust.
COPYRIGHT: (C)1981,JPO&Japio
JP8137579A 1979-06-29 1979-06-29 Transporting vehicle Pending JPS568723A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8137579A JPS568723A (en) 1979-06-29 1979-06-29 Transporting vehicle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8137579A JPS568723A (en) 1979-06-29 1979-06-29 Transporting vehicle

Publications (1)

Publication Number Publication Date
JPS568723A true JPS568723A (en) 1981-01-29

Family

ID=13744552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8137579A Pending JPS568723A (en) 1979-06-29 1979-06-29 Transporting vehicle

Country Status (1)

Country Link
JP (1) JPS568723A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6288657A (en) * 1985-10-15 1987-04-23 山形日本電気株式会社 Automatic cart
CN102839832A (en) * 2011-06-22 2012-12-26 鸿富锦精密工业（深圳）有限公司 Dust-free room

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6288657A (en) * 1985-10-15 1987-04-23 山形日本電気株式会社 Automatic cart
CN102839832A (en) * 2011-06-22 2012-12-26 鸿富锦精密工业（深圳）有限公司 Dust-free room

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