JPS5687807A - Detecting method of mark - Google Patents

Detecting method of mark

Info

Publication number
JPS5687807A
JPS5687807A JP16445679A JP16445679A JPS5687807A JP S5687807 A JPS5687807 A JP S5687807A JP 16445679 A JP16445679 A JP 16445679A JP 16445679 A JP16445679 A JP 16445679A JP S5687807 A JPS5687807 A JP S5687807A
Authority
JP
Japan
Prior art keywords
mark
computer
sample
rise time
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16445679A
Other languages
Japanese (ja)
Inventor
Yoshiaki Goto
Yasuo Furukawa
Seigo Igaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16445679A priority Critical patent/JPS5687807A/en
Publication of JPS5687807A publication Critical patent/JPS5687807A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

PURPOSE: To obtain the centroid position of a mark speedily and highly accurately by computing the rise time and the fall time of the mark detection.
CONSTITUTION: From a computer 21, the beam deflection control data for scanning a circular mark by an electron beam is supplied to a beam controller 19, which controls deflecting coils 13W15 so that the electron beam from an electron gun 11 scans a sample 16 in the x-y directions. The wave reflected from the sample 16 is detected by a photomultiplier 18 and inputted to a signal processing circuit 20, which detects the rise time and the fall time of the mark detection and inputs them to the computer 21. Based on said times, the computer 21 checks the mark position.
COPYRIGHT: (C)1981,JPO&Japio
JP16445679A 1979-12-18 1979-12-18 Detecting method of mark Pending JPS5687807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16445679A JPS5687807A (en) 1979-12-18 1979-12-18 Detecting method of mark

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16445679A JPS5687807A (en) 1979-12-18 1979-12-18 Detecting method of mark

Publications (1)

Publication Number Publication Date
JPS5687807A true JPS5687807A (en) 1981-07-16

Family

ID=15793515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16445679A Pending JPS5687807A (en) 1979-12-18 1979-12-18 Detecting method of mark

Country Status (1)

Country Link
JP (1) JPS5687807A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5136303A (en) * 1990-02-20 1992-08-04 Nippon Telegraph And Telephone Corporation Wrist watch type receiver

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5136303A (en) * 1990-02-20 1992-08-04 Nippon Telegraph And Telephone Corporation Wrist watch type receiver

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