JPS5690165A - Gate valve for vacuum - Google Patents
Gate valve for vacuumInfo
- Publication number
- JPS5690165A JPS5690165A JP16596679A JP16596679A JPS5690165A JP S5690165 A JPS5690165 A JP S5690165A JP 16596679 A JP16596679 A JP 16596679A JP 16596679 A JP16596679 A JP 16596679A JP S5690165 A JPS5690165 A JP S5690165A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- valve bodies
- sealing surfaces
- make
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 abstract 5
- 239000012530 fluid Substances 0.000 abstract 2
Landscapes
- Sliding Valves (AREA)
Abstract
PURPOSE: To obtain a strong and uniform tightening force and to improve a gate valve for a vacuum in reliability by providing valve bodies which face to and isolate the sealing surfaces of a valve main body, a mechanism to make said valve bodies move vertically and another mechanism to make said valve bodies move forwards to or backwards from the sealing surfaces of the valve main body.
CONSTITUTION: Provided are valve bodies which face to and isolate sealing surfaces X and Y of a valve main body 31, a mechanism comprising a piston 17 to make the valve bodies 36 move vertically and the like and another mechanism comprising spring 37 to make the valve bodies 36 move forwards to or backwards from the sealing surfaces X and Y, bellows 34 and the like. For example, when the valve is closed, a pressure fluid flows in the upper part of a cylinder 16, causing the piston 17 to descend and consequently the valve bodies 36 and the like descend. On doing this, a switch 39B collides with a dog 40 and generates a signal to actuate the sole noid valve attached to a flexible pipe 41 to allow the pressure fluid to flow in a chamber A through an operating rod 32 and the like. Accordingly, the bellows 34 are expanded to force the valve bodies 36 to move outwards against the springs 37 and contact with the sealing surfaces X and Y.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16596679A JPS5690165A (en) | 1979-12-20 | 1979-12-20 | Gate valve for vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16596679A JPS5690165A (en) | 1979-12-20 | 1979-12-20 | Gate valve for vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5690165A true JPS5690165A (en) | 1981-07-22 |
Family
ID=15822387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16596679A Pending JPS5690165A (en) | 1979-12-20 | 1979-12-20 | Gate valve for vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5690165A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040008877A (en) * | 2002-07-19 | 2004-01-31 | 박웅기 | Vaccum Gate Valve |
| KR100489250B1 (en) * | 2002-10-17 | 2005-05-17 | 박웅기 | Vaccum Gate Valve |
| KR100489553B1 (en) * | 2002-07-19 | 2005-05-23 | 박웅기 | Vaccum Gate Valve |
| KR100808101B1 (en) * | 2006-01-11 | 2008-02-29 | 박웅기 | Vacuum gate valve |
| KR100837303B1 (en) | 2007-10-16 | 2008-06-12 | (주) 퓨쳐하이테크 | Gate Valves for Semiconductor and LC Vacuum Equipment |
| WO2011027861A1 (en) * | 2009-09-03 | 2011-03-10 | 株式会社アルバック | Gate valve |
| KR101260974B1 (en) | 2010-04-21 | 2013-05-06 | 권복화 | the gate valve |
| CN103322226A (en) * | 2013-07-05 | 2013-09-25 | 费海鸿 | Insert pneumatic vacuum transfer valve |
| US20190257441A1 (en) * | 2013-05-31 | 2019-08-22 | Dayco Ip Holdings, Llc | Sprung gate valves movable by an actuator |
-
1979
- 1979-12-20 JP JP16596679A patent/JPS5690165A/en active Pending
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040008877A (en) * | 2002-07-19 | 2004-01-31 | 박웅기 | Vaccum Gate Valve |
| KR100489553B1 (en) * | 2002-07-19 | 2005-05-23 | 박웅기 | Vaccum Gate Valve |
| KR100489250B1 (en) * | 2002-10-17 | 2005-05-17 | 박웅기 | Vaccum Gate Valve |
| KR100808101B1 (en) * | 2006-01-11 | 2008-02-29 | 박웅기 | Vacuum gate valve |
| KR100837303B1 (en) | 2007-10-16 | 2008-06-12 | (주) 퓨쳐하이테크 | Gate Valves for Semiconductor and LC Vacuum Equipment |
| CN102575779A (en) * | 2009-09-03 | 2012-07-11 | 株式会社爱发科 | Gate valve |
| WO2011027861A1 (en) * | 2009-09-03 | 2011-03-10 | 株式会社アルバック | Gate valve |
| JP5378526B2 (en) * | 2009-09-03 | 2013-12-25 | 株式会社アルバック | Gate valve |
| US8733734B2 (en) | 2009-09-03 | 2014-05-27 | Ulvac, Inc. | Gate valve |
| KR101430515B1 (en) * | 2009-09-03 | 2014-08-18 | 가부시키가이샤 아루박 | Gate valve |
| KR101260974B1 (en) | 2010-04-21 | 2013-05-06 | 권복화 | the gate valve |
| US20190257441A1 (en) * | 2013-05-31 | 2019-08-22 | Dayco Ip Holdings, Llc | Sprung gate valves movable by an actuator |
| US11067177B2 (en) * | 2013-05-31 | 2021-07-20 | Dayco Ip Holdings, Llc | Sprung gate valves movable by an actuator |
| CN103322226A (en) * | 2013-07-05 | 2013-09-25 | 费海鸿 | Insert pneumatic vacuum transfer valve |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5690165A (en) | Gate valve for vacuum | |
| ES2154997A1 (en) | Gas spring having an intermediate stop function and temperature compensation | |
| EP0318671A3 (en) | Pneumatic shock absorber | |
| EP0149908A3 (en) | Hydraulic apparatus having seal assembly for containing fluid leakage | |
| EP0870699A3 (en) | Aerosol valves | |
| RU93050810A (en) | IMPROVED SEAL SYSTEM | |
| JPS5524267A (en) | Oil pressure buffer | |
| JPS52102929A (en) | Exhaust-gas-circulation control valve system for automobile | |
| ES2009793B3 (en) | HYDRAULIC BRAKE AMPLIFIER WITH FAST FILLING AND REDUCED RACE. | |
| IE780576L (en) | Gas lift valve | |
| FR2386756A2 (en) | Plug valve for high pressure and high temp. use - has multiple flexible metal diaphragm to seal spindle which is inclined to bore of body | |
| US3105414A (en) | High energy impactor apparatus | |
| EP1026421A3 (en) | Gas spring | |
| GB918493A (en) | Improvements in or relating to fluid-flow control valves | |
| KR920006682B1 (en) | Attached pulverulent and granular material shake-down apparatus | |
| EP0219833A3 (en) | Portless type master cylinder device with intake valve and flow resisting means between pressure chamber and reservoir chamber | |
| GB1382378A (en) | Fluid pressure operated actuator | |
| JPS55139562A (en) | Valve device | |
| US4401030A (en) | Portable marking tool | |
| JPS53139011A (en) | Valve mechanism of internal combustion engine | |
| SU699270A1 (en) | Solenoid valve | |
| ES359752A1 (en) | Elastomeric loading of a ptfe seal in a ball valve | |
| SU994844A1 (en) | Safety valve | |
| FR2378967A1 (en) | Relay valve for compressed air cylinder - has control piston charged by adjustable spring and back pressure valves | |
| SU808751A1 (en) | Piston seal |