JPS5690165A - Gate valve for vacuum - Google Patents

Gate valve for vacuum

Info

Publication number
JPS5690165A
JPS5690165A JP16596679A JP16596679A JPS5690165A JP S5690165 A JPS5690165 A JP S5690165A JP 16596679 A JP16596679 A JP 16596679A JP 16596679 A JP16596679 A JP 16596679A JP S5690165 A JPS5690165 A JP S5690165A
Authority
JP
Japan
Prior art keywords
valve
valve bodies
sealing surfaces
make
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16596679A
Other languages
Japanese (ja)
Inventor
Kuniaki Wakabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP16596679A priority Critical patent/JPS5690165A/en
Publication of JPS5690165A publication Critical patent/JPS5690165A/en
Pending legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)

Abstract

PURPOSE: To obtain a strong and uniform tightening force and to improve a gate valve for a vacuum in reliability by providing valve bodies which face to and isolate the sealing surfaces of a valve main body, a mechanism to make said valve bodies move vertically and another mechanism to make said valve bodies move forwards to or backwards from the sealing surfaces of the valve main body.
CONSTITUTION: Provided are valve bodies which face to and isolate sealing surfaces X and Y of a valve main body 31, a mechanism comprising a piston 17 to make the valve bodies 36 move vertically and the like and another mechanism comprising spring 37 to make the valve bodies 36 move forwards to or backwards from the sealing surfaces X and Y, bellows 34 and the like. For example, when the valve is closed, a pressure fluid flows in the upper part of a cylinder 16, causing the piston 17 to descend and consequently the valve bodies 36 and the like descend. On doing this, a switch 39B collides with a dog 40 and generates a signal to actuate the sole noid valve attached to a flexible pipe 41 to allow the pressure fluid to flow in a chamber A through an operating rod 32 and the like. Accordingly, the bellows 34 are expanded to force the valve bodies 36 to move outwards against the springs 37 and contact with the sealing surfaces X and Y.
COPYRIGHT: (C)1981,JPO&Japio
JP16596679A 1979-12-20 1979-12-20 Gate valve for vacuum Pending JPS5690165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16596679A JPS5690165A (en) 1979-12-20 1979-12-20 Gate valve for vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16596679A JPS5690165A (en) 1979-12-20 1979-12-20 Gate valve for vacuum

Publications (1)

Publication Number Publication Date
JPS5690165A true JPS5690165A (en) 1981-07-22

Family

ID=15822387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16596679A Pending JPS5690165A (en) 1979-12-20 1979-12-20 Gate valve for vacuum

Country Status (1)

Country Link
JP (1) JPS5690165A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040008877A (en) * 2002-07-19 2004-01-31 박웅기 Vaccum Gate Valve
KR100489250B1 (en) * 2002-10-17 2005-05-17 박웅기 Vaccum Gate Valve
KR100489553B1 (en) * 2002-07-19 2005-05-23 박웅기 Vaccum Gate Valve
KR100808101B1 (en) * 2006-01-11 2008-02-29 박웅기 Vacuum gate valve
KR100837303B1 (en) 2007-10-16 2008-06-12 (주) 퓨쳐하이테크 Gate Valves for Semiconductor and LC Vacuum Equipment
WO2011027861A1 (en) * 2009-09-03 2011-03-10 株式会社アルバック Gate valve
KR101260974B1 (en) 2010-04-21 2013-05-06 권복화 the gate valve
CN103322226A (en) * 2013-07-05 2013-09-25 费海鸿 Insert pneumatic vacuum transfer valve
US20190257441A1 (en) * 2013-05-31 2019-08-22 Dayco Ip Holdings, Llc Sprung gate valves movable by an actuator

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040008877A (en) * 2002-07-19 2004-01-31 박웅기 Vaccum Gate Valve
KR100489553B1 (en) * 2002-07-19 2005-05-23 박웅기 Vaccum Gate Valve
KR100489250B1 (en) * 2002-10-17 2005-05-17 박웅기 Vaccum Gate Valve
KR100808101B1 (en) * 2006-01-11 2008-02-29 박웅기 Vacuum gate valve
KR100837303B1 (en) 2007-10-16 2008-06-12 (주) 퓨쳐하이테크 Gate Valves for Semiconductor and LC Vacuum Equipment
CN102575779A (en) * 2009-09-03 2012-07-11 株式会社爱发科 Gate valve
WO2011027861A1 (en) * 2009-09-03 2011-03-10 株式会社アルバック Gate valve
JP5378526B2 (en) * 2009-09-03 2013-12-25 株式会社アルバック Gate valve
US8733734B2 (en) 2009-09-03 2014-05-27 Ulvac, Inc. Gate valve
KR101430515B1 (en) * 2009-09-03 2014-08-18 가부시키가이샤 아루박 Gate valve
KR101260974B1 (en) 2010-04-21 2013-05-06 권복화 the gate valve
US20190257441A1 (en) * 2013-05-31 2019-08-22 Dayco Ip Holdings, Llc Sprung gate valves movable by an actuator
US11067177B2 (en) * 2013-05-31 2021-07-20 Dayco Ip Holdings, Llc Sprung gate valves movable by an actuator
CN103322226A (en) * 2013-07-05 2013-09-25 费海鸿 Insert pneumatic vacuum transfer valve

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