JPS57103253A - Electron beam device - Google Patents

Electron beam device

Info

Publication number
JPS57103253A
JPS57103253A JP55178503A JP17850380A JPS57103253A JP S57103253 A JPS57103253 A JP S57103253A JP 55178503 A JP55178503 A JP 55178503A JP 17850380 A JP17850380 A JP 17850380A JP S57103253 A JPS57103253 A JP S57103253A
Authority
JP
Japan
Prior art keywords
magnetic field
electron beam
effect
signal
correction signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55178503A
Other languages
Japanese (ja)
Inventor
Hiroshi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55178503A priority Critical patent/JPS57103253A/en
Publication of JPS57103253A publication Critical patent/JPS57103253A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To reduce the effect of an external magnetic field by detecting the external magnetic field and deflecting an electron beam so as to eliminate the effect. CONSTITUTION:An electron beam 2 generated from an electron beam source 1 deflects the deflection signal 4 of a deflection signal generator 3 and a magnetic field correction signal 12 which is the output of a magnetic field detector 11 detecting a magnetic field near a mirror cylinder 6 through a deflector 5 by a signal mixed by a mixer 13. The magnetic field detector 11 has one or more magnetic field detector near the mirror cylinder. The magnetic field correction signal 12 adjusts the phase and amplitude in a change of the magnetic field so that the effect of the magnetic field on the location of an electron beam can be minimized. Besides, the mixer adjusts the phase and amplitude of the magnetic field correction signal 12. As a result, the effect of an external magnetic field can be reduced with by means of a simple device.
JP55178503A 1980-12-17 1980-12-17 Electron beam device Pending JPS57103253A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55178503A JPS57103253A (en) 1980-12-17 1980-12-17 Electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55178503A JPS57103253A (en) 1980-12-17 1980-12-17 Electron beam device

Publications (1)

Publication Number Publication Date
JPS57103253A true JPS57103253A (en) 1982-06-26

Family

ID=16049597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55178503A Pending JPS57103253A (en) 1980-12-17 1980-12-17 Electron beam device

Country Status (1)

Country Link
JP (1) JPS57103253A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6091541A (en) * 1983-10-25 1985-05-22 Jeol Ltd Disturbance magnetic field cancellation unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6091541A (en) * 1983-10-25 1985-05-22 Jeol Ltd Disturbance magnetic field cancellation unit

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