JPS57111402A - Pattern detector - Google Patents

Pattern detector

Info

Publication number
JPS57111402A
JPS57111402A JP18708280A JP18708280A JPS57111402A JP S57111402 A JPS57111402 A JP S57111402A JP 18708280 A JP18708280 A JP 18708280A JP 18708280 A JP18708280 A JP 18708280A JP S57111402 A JPS57111402 A JP S57111402A
Authority
JP
Japan
Prior art keywords
lens
scan
laser beam
fresnel lens
optical scanner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18708280A
Other languages
Japanese (ja)
Inventor
Yushi Inagaki
Moritoshi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18708280A priority Critical patent/JPS57111402A/en
Publication of JPS57111402A publication Critical patent/JPS57111402A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To obtain a pattern detector having a smal size with high efficiency, by providing a Fresnel lens and a scanning lens that pierces through a hole drilled at the center part of the Fresnel lens right under an optical scanner. CONSTITUTION:A laser beam emitted from a laser beam source 1 is put into an optical scanner 3 after its diameter is increased through a beam increasing system 2. The scanner 3 gives the vibration to the laser beam with an amplitude of 10-40mm. to carry out the scan. This scan is carried out in a single direction. Thus a printed panel 6 is provided in the other direction to ensure a full surface scan via a scan lens 4 and a Fresnel lens 5. The beams which are made incident to a metallic foil pattern of the panel 6 and reflected there are condensed by the lens 5 to be put into a photodector 7.
JP18708280A 1980-12-29 1980-12-29 Pattern detector Pending JPS57111402A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18708280A JPS57111402A (en) 1980-12-29 1980-12-29 Pattern detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18708280A JPS57111402A (en) 1980-12-29 1980-12-29 Pattern detector

Publications (1)

Publication Number Publication Date
JPS57111402A true JPS57111402A (en) 1982-07-10

Family

ID=16199807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18708280A Pending JPS57111402A (en) 1980-12-29 1980-12-29 Pattern detector

Country Status (1)

Country Link
JP (1) JPS57111402A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101208573B1 (en) 2009-03-21 2012-12-06 아주하이텍(주) Optical condensing member and illumination unit, and optical inspection apparatus using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101208573B1 (en) 2009-03-21 2012-12-06 아주하이텍(주) Optical condensing member and illumination unit, and optical inspection apparatus using the same

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