JPS57113236A - Position indicating system - Google Patents
Position indicating systemInfo
- Publication number
- JPS57113236A JPS57113236A JP55189534A JP18953480A JPS57113236A JP S57113236 A JPS57113236 A JP S57113236A JP 55189534 A JP55189534 A JP 55189534A JP 18953480 A JP18953480 A JP 18953480A JP S57113236 A JPS57113236 A JP S57113236A
- Authority
- JP
- Japan
- Prior art keywords
- image
- sample
- projected
- mark
- position indicating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W46/00—Marks applied to devices, e.g. for alignment or identification
- H10W46/301—Marks applied to devices, e.g. for alignment or identification for alignment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07551—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
Landscapes
- Wire Bonding (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55189534A JPS57113236A (en) | 1980-12-30 | 1980-12-30 | Position indicating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55189534A JPS57113236A (en) | 1980-12-30 | 1980-12-30 | Position indicating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57113236A true JPS57113236A (en) | 1982-07-14 |
Family
ID=16242905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55189534A Pending JPS57113236A (en) | 1980-12-30 | 1980-12-30 | Position indicating system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57113236A (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5146070A (ja) * | 1974-10-18 | 1976-04-20 | Hitachi Ltd | |
| JPS54115068A (en) * | 1978-02-28 | 1979-09-07 | Shinkawa Seisakusho Kk | Device for positioning pattern |
-
1980
- 1980-12-30 JP JP55189534A patent/JPS57113236A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5146070A (ja) * | 1974-10-18 | 1976-04-20 | Hitachi Ltd | |
| JPS54115068A (en) * | 1978-02-28 | 1979-09-07 | Shinkawa Seisakusho Kk | Device for positioning pattern |
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