JPS57166000A - Controller for neutral particle incident device - Google Patents

Controller for neutral particle incident device

Info

Publication number
JPS57166000A
JPS57166000A JP56050221A JP5022181A JPS57166000A JP S57166000 A JPS57166000 A JP S57166000A JP 56050221 A JP56050221 A JP 56050221A JP 5022181 A JP5022181 A JP 5022181A JP S57166000 A JPS57166000 A JP S57166000A
Authority
JP
Japan
Prior art keywords
controller
neutral particle
incident device
particle incident
neutral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56050221A
Other languages
English (en)
Other versions
JPS6412080B2 (ja
Inventor
Eiji Toyoda
Katsuya Yoshida
Susumu Yoshizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56050221A priority Critical patent/JPS57166000A/ja
Publication of JPS57166000A publication Critical patent/JPS57166000A/ja
Publication of JPS6412080B2 publication Critical patent/JPS6412080B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP56050221A 1981-04-03 1981-04-03 Controller for neutral particle incident device Granted JPS57166000A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56050221A JPS57166000A (en) 1981-04-03 1981-04-03 Controller for neutral particle incident device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56050221A JPS57166000A (en) 1981-04-03 1981-04-03 Controller for neutral particle incident device

Publications (2)

Publication Number Publication Date
JPS57166000A true JPS57166000A (en) 1982-10-13
JPS6412080B2 JPS6412080B2 (ja) 1989-02-28

Family

ID=12852990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56050221A Granted JPS57166000A (en) 1981-04-03 1981-04-03 Controller for neutral particle incident device

Country Status (1)

Country Link
JP (1) JPS57166000A (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55147389A (en) * 1979-05-07 1980-11-17 Japan Atomic Energy Res Inst Experiment condition setting device
JPS55150005A (en) * 1979-05-14 1980-11-21 Japan Atom Energy Res Inst Generalizing controller for test unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55147389A (en) * 1979-05-07 1980-11-17 Japan Atomic Energy Res Inst Experiment condition setting device
JPS55150005A (en) * 1979-05-14 1980-11-21 Japan Atom Energy Res Inst Generalizing controller for test unit

Also Published As

Publication number Publication date
JPS6412080B2 (ja) 1989-02-28

Similar Documents

Publication Publication Date Title
JPS57194152A (en) Device for moving load
GB2097495B (en) Brake control device
AU559296B2 (en) Filter device
JPS57160817A (en) Device for conforming direction
JPS57200752A (en) Controller for transmission
JPS57194154A (en) Device for moving load
DE3370362D1 (en) Hydraulic control device
JPS57106000A (en) Neutral particle incident device
JPS57191921A (en) Controller
GB2096283B (en) Electro-fluid control device
JPS57149178A (en) Manipulating device
JPS57166000A (en) Controller for neutral particle incident device
JPS57191998A (en) Controller for neutral particle incident unit
JPS57142110A (en) Interlock device for gounding unit
GB8307566D0 (en) Device for electro-magnetic control
JPS56147399A (en) Neutral particle incident device
JPS57130877A (en) Parking device for autobicycle
JPS56159099A (en) Control device for neutral particle incident unit
JPS57205672A (en) Parking device
JPS57122631A (en) Demand control device
JPS57189521A (en) Kva controller
JPS57180100A (en) Cooler for neutral particle incident unit
JPS56112099A (en) Neutral particle incident device
JPS57183000A (en) Neutral particle incident unit
JPS57197800A (en) Neutral particle incident unit