JPS5716737B2 - - Google Patents
Info
- Publication number
- JPS5716737B2 JPS5716737B2 JP7751176A JP7751176A JPS5716737B2 JP S5716737 B2 JPS5716737 B2 JP S5716737B2 JP 7751176 A JP7751176 A JP 7751176A JP 7751176 A JP7751176 A JP 7751176A JP S5716737 B2 JPS5716737 B2 JP S5716737B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7751176A JPS533169A (en) | 1976-06-30 | 1976-06-30 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7751176A JPS533169A (en) | 1976-06-30 | 1976-06-30 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS533169A JPS533169A (en) | 1978-01-12 |
| JPS5716737B2 true JPS5716737B2 (lt) | 1982-04-07 |
Family
ID=13635981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7751176A Granted JPS533169A (en) | 1976-06-30 | 1976-06-30 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS533169A (lt) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61184744U (lt) * | 1985-05-08 | 1986-11-18 | ||
| JP6053423B2 (ja) * | 2012-09-25 | 2016-12-27 | キヤノン株式会社 | シリコン基板のエッチング方法 |
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1976
- 1976-06-30 JP JP7751176A patent/JPS533169A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS533169A (en) | 1978-01-12 |