JPS57169657A - Appearance inspecting device - Google Patents

Appearance inspecting device

Info

Publication number
JPS57169657A
JPS57169657A JP5469781A JP5469781A JPS57169657A JP S57169657 A JPS57169657 A JP S57169657A JP 5469781 A JP5469781 A JP 5469781A JP 5469781 A JP5469781 A JP 5469781A JP S57169657 A JPS57169657 A JP S57169657A
Authority
JP
Japan
Prior art keywords
regions
contg
contours
region
inspecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5469781A
Other languages
Japanese (ja)
Inventor
Hirohisa Takusagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP5469781A priority Critical patent/JPS57169657A/en
Publication of JPS57169657A publication Critical patent/JPS57169657A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To inspect the appearance of intricate contour patterns with good accuracy in appearance inspection by image pickup signal processing however intricate the patterns may be by dividing the inspecting region to regions contg. the contours and the regions contg. no contours and setting permissible values for detec quantities for each of the regions. CONSTITUTION:An inspecting object 50 is illuminated by an illuminating device 51, and the optical image thereof is converted to an image pickup signal by a photoelectric conversion device 52, and is inputted via an amplifier 53 to a change point detecting part 54. Said part 54 differentiates and binary encodes the image pickup signal, outputs one pulse for each of the respective change points and inputs these pulses to gates 56, 57. A region assigning part 55 divides and assigns the inspecting region to the regions A contg. the contours of the inspecting object and the regions B contg. no contours, and opens and closes the gates 56, 57 at every region of the current scanning point. For each of the regions, defect quantities are counted with defect counters 58, 59, and these are compared with the set values of each of the regions of a permissible defect value setting part 61 in a comparing decision part 60, whereby the inspecting object is discriminated as defective or non-defective.
JP5469781A 1981-04-11 1981-04-11 Appearance inspecting device Pending JPS57169657A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5469781A JPS57169657A (en) 1981-04-11 1981-04-11 Appearance inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5469781A JPS57169657A (en) 1981-04-11 1981-04-11 Appearance inspecting device

Publications (1)

Publication Number Publication Date
JPS57169657A true JPS57169657A (en) 1982-10-19

Family

ID=12977990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5469781A Pending JPS57169657A (en) 1981-04-11 1981-04-11 Appearance inspecting device

Country Status (1)

Country Link
JP (1) JPS57169657A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119661U (en) * 1986-01-22 1987-07-29
WO2017043270A1 (en) * 2015-09-09 2017-03-16 住友電装株式会社 Inspection method for terminal-equipped electric wire and inspection device for terminal-equipped electric wire

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119661U (en) * 1986-01-22 1987-07-29
WO2017043270A1 (en) * 2015-09-09 2017-03-16 住友電装株式会社 Inspection method for terminal-equipped electric wire and inspection device for terminal-equipped electric wire

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