JPS57177581A - Josephoson junction integrated circuit and method of producing same - Google Patents

Josephoson junction integrated circuit and method of producing same

Info

Publication number
JPS57177581A
JPS57177581A JP57058353A JP5835382A JPS57177581A JP S57177581 A JPS57177581 A JP S57177581A JP 57058353 A JP57058353 A JP 57058353A JP 5835382 A JP5835382 A JP 5835382A JP S57177581 A JPS57177581 A JP S57177581A
Authority
JP
Japan
Prior art keywords
josephoson
integrated circuit
producing same
junction integrated
junction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57058353A
Other languages
English (en)
Inventor
Uooren Jirii Jiyunia Don
Nooman Sumisu Roorensu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unisys Corp
Original Assignee
Sperry Rand Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sperry Rand Corp filed Critical Sperry Rand Corp
Publication of JPS57177581A publication Critical patent/JPS57177581A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N69/00—Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
    • Y10S505/873—Active solid-state device
    • Y10S505/874—Active solid-state device with josephson junction, e.g. squid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
    • Y10S505/917—Mechanically manufacturing superconductor
    • Y10S505/922—Making josephson junction device

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP57058353A 1981-04-09 1982-04-09 Josephoson junction integrated circuit and method of producing same Pending JPS57177581A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/252,528 US4430662A (en) 1981-04-09 1981-04-09 Superconductive tunnel junction integrated circuit

Publications (1)

Publication Number Publication Date
JPS57177581A true JPS57177581A (en) 1982-11-01

Family

ID=22956390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57058353A Pending JPS57177581A (en) 1981-04-09 1982-04-09 Josephoson junction integrated circuit and method of producing same

Country Status (4)

Country Link
US (2) US4430662A (ja)
EP (1) EP0063887B1 (ja)
JP (1) JPS57177581A (ja)
DE (1) DE3262485D1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5979584A (ja) * 1982-10-29 1984-05-08 Hitachi Ltd ジヨセフソン集積回路用抵抗
JPS59172281A (ja) * 1983-03-18 1984-09-28 Agency Of Ind Science & Technol ジヨセフソンｌｓｉ
JPH0379093A (ja) * 1989-08-23 1991-04-04 Hitachi Ltd ジョセフソン集積回路

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4554567A (en) * 1983-03-21 1985-11-19 Sperry Corporation Superconductive integrated circuit incorporating a magnetically controlled interferometer
US4544937A (en) * 1983-04-01 1985-10-01 Sperry Corporation Formation of normal resistors by degenerate doping of substrates
US4589961A (en) * 1984-08-31 1986-05-20 Sperry Corporation Aluminum mask anodization with lift-off for patterning Josephson junction devices
US5795849A (en) * 1987-12-21 1998-08-18 Hickman; Paul L. Bulk ceramic superconductor structures
US4878094A (en) * 1988-03-30 1989-10-31 Minko Balkanski Self-powered electronic component and manufacturing method therefor
US5084404A (en) * 1988-03-31 1992-01-28 Advanced Micro Devices Gate array structure and process to allow optioning at second metal mask only
US4904980A (en) * 1988-08-19 1990-02-27 Westinghouse Electric Corp. Refractory resistors with etch stop for superconductor integrated circuits
US4904341A (en) * 1988-08-22 1990-02-27 Westinghouse Electric Corp. Selective silicon dioxide etchant for superconductor integrated circuits
JP2964112B2 (ja) * 1992-08-11 1999-10-18 セイコーインスツルメンツ株式会社 直流駆動型超伝導量子干渉素子
US5358928A (en) * 1992-09-22 1994-10-25 Sandia Corporation High temperature superconductor step-edge Josephson junctions using Ti-Ca-Ba-Cu-O
DE4320484A1 (de) * 1993-06-21 1994-12-22 Dornier Gmbh Steuerbares Supraleiter-Bauelement
US5863868A (en) * 1996-04-08 1999-01-26 Trw Inc. Superconductive quantum interference device for digital logic circuits
US5962865A (en) 1997-04-11 1999-10-05 Trw Inc. Low inductance superconductive integrated circuit and method of fabricating the same
US6404615B1 (en) 2000-02-16 2002-06-11 Intarsia Corporation Thin film capacitors
US6486530B1 (en) 2000-10-16 2002-11-26 Intarsia Corporation Integration of anodized metal capacitors and high temperature deposition capacitors
US6518673B2 (en) * 2001-06-15 2003-02-11 Trw Inc. Capacitor for signal propagation across ground plane boundaries in superconductor integrated circuits
JP3820444B2 (ja) * 2002-01-25 2006-09-13 独立行政法人情報通信研究機構 トンネル接合素子を用いた同調回路および超伝導集積回路
US20050092981A1 (en) * 2003-11-04 2005-05-05 Hunt Jeffrey H. Superconducting integrated circuit and methods of forming same
US20080257549A1 (en) * 2006-06-08 2008-10-23 Halliburton Energy Services, Inc. Consumable Downhole Tools
US20070284097A1 (en) * 2006-06-08 2007-12-13 Halliburton Energy Services, Inc. Consumable downhole tools
US7591318B2 (en) * 2006-07-20 2009-09-22 Halliburton Energy Services, Inc. Method for removing a sealing plug from a well
US7615385B2 (en) 2006-09-20 2009-11-10 Hypres, Inc Double-masking technique for increasing fabrication yield in superconducting electronics
US20080202764A1 (en) * 2007-02-22 2008-08-28 Halliburton Energy Services, Inc. Consumable downhole tools
US8395053B2 (en) * 2007-06-27 2013-03-12 Stats Chippac Ltd. Circuit system with circuit element and reference plane
US8327926B2 (en) 2008-03-26 2012-12-11 Robertson Intellectual Properties, LLC Method for removing a consumable downhole tool
US8235102B1 (en) 2008-03-26 2012-08-07 Robertson Intellectual Properties, LLC Consumable downhole tool
US9520180B1 (en) 2014-03-11 2016-12-13 Hypres, Inc. System and method for cryogenic hybrid technology computing and memory
US20170047276A1 (en) * 2015-08-13 2017-02-16 Advanced Semiconductor Engineering, Inc. Semiconductor device package and method of manufacturing the same
CN105702849B (zh) * 2016-02-01 2018-09-07 中国科学院上海微系统与信息技术研究所 台阶区域覆盖有超导覆盖层的超导电路结构及其制备方法
US10367134B2 (en) 2017-06-07 2019-07-30 International Business Machines Corporation Shadow mask sidewall tunnel junction for quantum computing
US10665769B2 (en) * 2018-06-19 2020-05-26 Intel Corporation Quantum circuit assemblies with vertically-stacked parallel-plate capacitors
US10916690B2 (en) * 2018-11-28 2021-02-09 International Business Machines Corporation Electrical leads for trenched qubits
US12108689B2 (en) 2021-03-12 2024-10-01 International Business Machines Corporation Trimmable inductors for qubit frequency tuning

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5423239A (en) * 1977-07-21 1979-02-21 Nippon Denso Co Ltd Rotary refrigerator
JPS55166979A (en) * 1979-03-23 1980-12-26 Sperry Rand Corp Josephson tunnel junction device having polycrystalline silicon* germanium or silicon germanium alloy tunneling barrier

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3849276A (en) * 1971-03-19 1974-11-19 Ibm Process for forming reactive layers whose thickness is independent of time
US4176290A (en) * 1976-10-27 1979-11-27 Nippon Telegraph And Telephone Public Corporation Superconductive Josephson circuit device
US4117503A (en) 1977-06-30 1978-09-26 International Business Machines Corporation Josephson interferometer structure which suppresses resonances
US4176365A (en) * 1978-05-08 1979-11-27 Sperry Rand Corporation Josephson tunnel junction device with hydrogenated amorphous silicon, germanium or silicon-germanium alloy tunneling barrier
US4224630A (en) * 1978-08-25 1980-09-23 Sperry Corporation Multiple weak-link SQUID
EP0035350B1 (en) * 1980-02-20 1984-01-25 Fujitsu Limited Superconductive logic device incorporating a josephson junction
US4421785A (en) * 1980-08-18 1983-12-20 Sperry Corporation Superconductive tunnel junction device and method of manufacture
US4344052A (en) * 1980-09-29 1982-08-10 International Business Machines Corporation Distributed array of Josephson devices with coherence
US4315255A (en) 1980-10-27 1982-02-09 The United States Of America As Represented By The Secretary Of The Navy Multiple-quantum interference superconducting analog-to-digital converter
US4344223A (en) * 1980-11-26 1982-08-17 Western Electric Company, Inc. Monolithic hybrid integrated circuits

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5423239A (en) * 1977-07-21 1979-02-21 Nippon Denso Co Ltd Rotary refrigerator
JPS55166979A (en) * 1979-03-23 1980-12-26 Sperry Rand Corp Josephson tunnel junction device having polycrystalline silicon* germanium or silicon germanium alloy tunneling barrier

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5979584A (ja) * 1982-10-29 1984-05-08 Hitachi Ltd ジヨセフソン集積回路用抵抗
JPS59172281A (ja) * 1983-03-18 1984-09-28 Agency Of Ind Science & Technol ジヨセフソンｌｓｉ
JPH0379093A (ja) * 1989-08-23 1991-04-04 Hitachi Ltd ジョセフソン集積回路

Also Published As

Publication number Publication date
EP0063887B1 (en) 1985-03-06
EP0063887A1 (en) 1982-11-03
DE3262485D1 (en) 1985-04-11
US4430662A (en) 1984-02-07
US4498228A (en) 1985-02-12

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