JPS5717802A - Center position detecting device for laser beam - Google Patents

Center position detecting device for laser beam

Info

Publication number
JPS5717802A
JPS5717802A JP9271980A JP9271980A JPS5717802A JP S5717802 A JPS5717802 A JP S5717802A JP 9271980 A JP9271980 A JP 9271980A JP 9271980 A JP9271980 A JP 9271980A JP S5717802 A JPS5717802 A JP S5717802A
Authority
JP
Japan
Prior art keywords
laser beam
thin lines
bridge
center position
resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9271980A
Other languages
English (en)
Other versions
JPS6219682B2 (ja
Inventor
Toshiji Shirokura
Hiroyuki Sugawara
Koji Kuwabara
Hiroharu Sasaki
Yoshio Yoshioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9271980A priority Critical patent/JPS5717802A/ja
Publication of JPS5717802A publication Critical patent/JPS5717802A/ja
Publication of JPS6219682B2 publication Critical patent/JPS6219682B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Laser Beam Processing (AREA)
JP9271980A 1980-07-09 1980-07-09 Center position detecting device for laser beam Granted JPS5717802A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9271980A JPS5717802A (en) 1980-07-09 1980-07-09 Center position detecting device for laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9271980A JPS5717802A (en) 1980-07-09 1980-07-09 Center position detecting device for laser beam

Publications (2)

Publication Number Publication Date
JPS5717802A true JPS5717802A (en) 1982-01-29
JPS6219682B2 JPS6219682B2 (ja) 1987-04-30

Family

ID=14062253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9271980A Granted JPS5717802A (en) 1980-07-09 1980-07-09 Center position detecting device for laser beam

Country Status (1)

Country Link
JP (1) JPS5717802A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0259748U (ja) * 1988-10-26 1990-05-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0259748U (ja) * 1988-10-26 1990-05-01

Also Published As

Publication number Publication date
JPS6219682B2 (ja) 1987-04-30

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