JPS57200873A - Probing apparatus - Google Patents

Probing apparatus

Info

Publication number
JPS57200873A
JPS57200873A JP8644881A JP8644881A JPS57200873A JP S57200873 A JPS57200873 A JP S57200873A JP 8644881 A JP8644881 A JP 8644881A JP 8644881 A JP8644881 A JP 8644881A JP S57200873 A JPS57200873 A JP S57200873A
Authority
JP
Japan
Prior art keywords
heads
elements
members
semiconductor elements
lowered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8644881A
Other languages
Japanese (ja)
Other versions
JPS6139629B2 (en
Inventor
Masashi Takada
Hisashi Sukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8644881A priority Critical patent/JPS57200873A/en
Publication of JPS57200873A publication Critical patent/JPS57200873A/en
Publication of JPS6139629B2 publication Critical patent/JPS6139629B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE:To prevent damage to semiconductor elements and probing heads by controlling vertical fluctuation of the heads according to the condition of engagement between semiconductor elements on a printed board and the heads. CONSTITUTION:Semiconductor elements 3A and 3B different in the outline are carried on a printed board 1 while vertically movable probing heads 6A and 6B are positioned with respect to elements 3 and heads 6 are separated and lowered to bring probes 16A and 16B thereof 6 into contact with terminals 15A and 15B of the elements 3 to conduct a test. Outlines detecting members 10A and 10B adapted to engage the elements 3 only corresponding to each head 6 are engaged with the elements 3 while the heads 6 lower by a specified value and then, the heads 6 alone are lowered. The completion of the engagement between members 10 and the elements 3 is detected with switches (SW) 11A and 11B and the relative movement between the heads 6 and the members 10 with SW 12A and 12B. When a detection signal is provided by the SW 12 but not by SW 11, cylinders 13A and 13B lift the heads 6 separately.
JP8644881A 1981-06-05 1981-06-05 Probing apparatus Granted JPS57200873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8644881A JPS57200873A (en) 1981-06-05 1981-06-05 Probing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8644881A JPS57200873A (en) 1981-06-05 1981-06-05 Probing apparatus

Publications (2)

Publication Number Publication Date
JPS57200873A true JPS57200873A (en) 1982-12-09
JPS6139629B2 JPS6139629B2 (en) 1986-09-04

Family

ID=13887204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8644881A Granted JPS57200873A (en) 1981-06-05 1981-06-05 Probing apparatus

Country Status (1)

Country Link
JP (1) JPS57200873A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS634368U (en) * 1986-06-27 1988-01-12

Also Published As

Publication number Publication date
JPS6139629B2 (en) 1986-09-04

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