JPS57201023A - Cassette holder for electron beam drawing apparatus - Google Patents

Cassette holder for electron beam drawing apparatus

Info

Publication number
JPS57201023A
JPS57201023A JP56086260A JP8626081A JPS57201023A JP S57201023 A JPS57201023 A JP S57201023A JP 56086260 A JP56086260 A JP 56086260A JP 8626081 A JP8626081 A JP 8626081A JP S57201023 A JPS57201023 A JP S57201023A
Authority
JP
Japan
Prior art keywords
electron beam
drawing apparatus
beam drawing
clamping plate
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56086260A
Other languages
Japanese (ja)
Inventor
Yoshio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP56086260A priority Critical patent/JPS57201023A/en
Publication of JPS57201023A publication Critical patent/JPS57201023A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To simplify positioning or the like in an electron beam drawing apparatus by providing a clamping plate. CONSTITUTION:A reference piece 13 contacted with the upper surface of a cassette 4 mounted on the upper surface of a table 1 and contained extensibly at the end on a recess 3, and a clamping plate elevationally movable in the vicinity of the lower part of the recess are provided, and a clamping lever 7, clamping springs 9, 11, and unclamping member which rockes the lever 7 against the springs are arranged on the lower surface of the clamping plate. A cassette 4 is inserted between the clamping plate and the piece 13, and a mechanism for urging and holding the cassette to the piece 13 by the springs 9, 11 is provided.
JP56086260A 1981-06-04 1981-06-04 Cassette holder for electron beam drawing apparatus Pending JPS57201023A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56086260A JPS57201023A (en) 1981-06-04 1981-06-04 Cassette holder for electron beam drawing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56086260A JPS57201023A (en) 1981-06-04 1981-06-04 Cassette holder for electron beam drawing apparatus

Publications (1)

Publication Number Publication Date
JPS57201023A true JPS57201023A (en) 1982-12-09

Family

ID=13881844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56086260A Pending JPS57201023A (en) 1981-06-04 1981-06-04 Cassette holder for electron beam drawing apparatus

Country Status (1)

Country Link
JP (1) JPS57201023A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55107230A (en) * 1979-02-09 1980-08-16 Jeol Ltd Sample holder in electron ray exposing device and the like
JPS5654037A (en) * 1979-10-08 1981-05-13 Jeol Ltd Sample holder in electron ray exposure device, etc.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55107230A (en) * 1979-02-09 1980-08-16 Jeol Ltd Sample holder in electron ray exposing device and the like
JPS5654037A (en) * 1979-10-08 1981-05-13 Jeol Ltd Sample holder in electron ray exposure device, etc.

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