JPS57201208A - Autofocusing device - Google Patents

Autofocusing device

Info

Publication number
JPS57201208A
JPS57201208A JP5544282A JP5544282A JPS57201208A JP S57201208 A JPS57201208 A JP S57201208A JP 5544282 A JP5544282 A JP 5544282A JP 5544282 A JP5544282 A JP 5544282A JP S57201208 A JPS57201208 A JP S57201208A
Authority
JP
Japan
Prior art keywords
mask
change
aperture
gas
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5544282A
Other languages
Japanese (ja)
Inventor
Kiyoshi Nakagawa
Hiroyuki Ibe
Yoshio Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5544282A priority Critical patent/JPS57201208A/en
Publication of JPS57201208A publication Critical patent/JPS57201208A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

PURPOSE:To automate the focusing for minute patterns, by jetting gas to a plate-shaped object from an aperture which is provided as one body together with an object lens and detecting the change of the length between the plate- shaped object and the aperture as a change of the back pressure of gas and converting this change to an electric signal to control a mechanical system. CONSTITUTION:Gas is jetted to a mask 5 as a material to be examined from an aperture 4 provided as one body together with an object lens 2 under a barrel 1 of a magnifier. A change (dl) of the length between the aperture 4 and the mask 5 is detected as a change (dp) of back pressure and is amplified by a pressure amplifier 17, and turn-on or off signal is inputted to a motor 12 by pressure-electric relays (converters) #1 and #2, and a set table 6 is moved vertically through a worm 13, a worm wheel 14, and a screw 15 to correct the deviation (dl) of the distance to the mask 5. The mask 5 is moved horizontally by the set table to examine the appearance of the overall surface of the mask 5. Consequently, the forcusing for minute patterns is automated.
JP5544282A 1982-04-05 1982-04-05 Autofocusing device Pending JPS57201208A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5544282A JPS57201208A (en) 1982-04-05 1982-04-05 Autofocusing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5544282A JPS57201208A (en) 1982-04-05 1982-04-05 Autofocusing device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP10118673A Division JPS5628244B2 (en) 1973-09-10 1973-09-10

Publications (1)

Publication Number Publication Date
JPS57201208A true JPS57201208A (en) 1982-12-09

Family

ID=12998702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5544282A Pending JPS57201208A (en) 1982-04-05 1982-04-05 Autofocusing device

Country Status (1)

Country Link
JP (1) JPS57201208A (en)

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