JPS572017A - Reflection type equal magnification image forming element - Google Patents
Reflection type equal magnification image forming elementInfo
- Publication number
- JPS572017A JPS572017A JP7630480A JP7630480A JPS572017A JP S572017 A JPS572017 A JP S572017A JP 7630480 A JP7630480 A JP 7630480A JP 7630480 A JP7630480 A JP 7630480A JP S572017 A JPS572017 A JP S572017A
- Authority
- JP
- Japan
- Prior art keywords
- image forming
- forming element
- array
- radius
- convex
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0856—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors
- G02B17/086—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors wherein the system is made of a single block of optical material, e.g. solid catadioptric systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/002—Arrays of reflective systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/008—Systems specially adapted to form image relays or chained systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Systems Of Projection Type Copiers (AREA)
- Lenses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7630480A JPS572017A (en) | 1980-06-06 | 1980-06-06 | Reflection type equal magnification image forming element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7630480A JPS572017A (en) | 1980-06-06 | 1980-06-06 | Reflection type equal magnification image forming element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS572017A true JPS572017A (en) | 1982-01-07 |
Family
ID=13601623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7630480A Pending JPS572017A (en) | 1980-06-06 | 1980-06-06 | Reflection type equal magnification image forming element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS572017A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014206756A (ja) * | 2005-06-02 | 2014-10-30 | カール・ツァイス・エスエムティー・ゲーエムベーハー | マイクロリソグラフィ投影対物レンズ |
-
1980
- 1980-06-06 JP JP7630480A patent/JPS572017A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014206756A (ja) * | 2005-06-02 | 2014-10-30 | カール・ツァイス・エスエムティー・ゲーエムベーハー | マイクロリソグラフィ投影対物レンズ |
| US10281824B2 (en) | 2005-06-02 | 2019-05-07 | Carl Zeiss Smt Gmbh | Microlithography projection objective |
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