JPS5720445A - Handling device for wafer - Google Patents

Handling device for wafer

Info

Publication number
JPS5720445A
JPS5720445A JP9537580A JP9537580A JPS5720445A JP S5720445 A JPS5720445 A JP S5720445A JP 9537580 A JP9537580 A JP 9537580A JP 9537580 A JP9537580 A JP 9537580A JP S5720445 A JPS5720445 A JP S5720445A
Authority
JP
Japan
Prior art keywords
wafer
fingers
recess
grooves
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9537580A
Other languages
English (en)
Inventor
Mitsutake Nagashima
Shigeru Futagami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP9537580A priority Critical patent/JPS5720445A/ja
Publication of JPS5720445A publication Critical patent/JPS5720445A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
JP9537580A 1980-07-11 1980-07-11 Handling device for wafer Pending JPS5720445A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9537580A JPS5720445A (en) 1980-07-11 1980-07-11 Handling device for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9537580A JPS5720445A (en) 1980-07-11 1980-07-11 Handling device for wafer

Publications (1)

Publication Number Publication Date
JPS5720445A true JPS5720445A (en) 1982-02-02

Family

ID=14135885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9537580A Pending JPS5720445A (en) 1980-07-11 1980-07-11 Handling device for wafer

Country Status (1)

Country Link
JP (1) JPS5720445A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984003196A1 (en) * 1983-02-14 1984-08-16 Brooks Ass Articulated arm transfer device
US4666366A (en) * 1983-02-14 1987-05-19 Canon Kabushiki Kaisha Articulated arm transfer device
US5445172A (en) * 1990-05-18 1995-08-29 Semitool, Inc. Wafer holder with flexibly mounted gripping fingers

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984003196A1 (en) * 1983-02-14 1984-08-16 Brooks Ass Articulated arm transfer device
US4666366A (en) * 1983-02-14 1987-05-19 Canon Kabushiki Kaisha Articulated arm transfer device
US4730976A (en) * 1983-02-14 1988-03-15 Aeronca Electronics, Inc. Articulated arm transfer device
US5445172A (en) * 1990-05-18 1995-08-29 Semitool, Inc. Wafer holder with flexibly mounted gripping fingers
US5573023A (en) * 1990-05-18 1996-11-12 Semitool, Inc. Single wafer processor apparatus

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