JPS5720877A - Position detector - Google Patents

Position detector

Info

Publication number
JPS5720877A
JPS5720877A JP9678380A JP9678380A JPS5720877A JP S5720877 A JPS5720877 A JP S5720877A JP 9678380 A JP9678380 A JP 9678380A JP 9678380 A JP9678380 A JP 9678380A JP S5720877 A JPS5720877 A JP S5720877A
Authority
JP
Japan
Prior art keywords
patterns
semiconductor chip
shift
bonding pad
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9678380A
Other languages
Japanese (ja)
Inventor
Yoshinori Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9678380A priority Critical patent/JPS5720877A/en
Publication of JPS5720877A publication Critical patent/JPS5720877A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/011—Apparatus therefor

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Character Input (AREA)
  • Image Input (AREA)
  • Wire Bonding (AREA)

Abstract

PURPOSE:To obtain a position detector that is not affected by the soil on a semiconductor chip, etc. and can easily detect the shift of position of a test subject like a semiconductor chip, etc. even in case only one bonding pad is available. CONSTITUTION:The signal supplied from a pickup device is subjected to A/D conversion 11 and is binary coded through binary coding circuits DS12 and 13 having comparison values V1 and V2. Then OR patterns P and P' in the main scanning direction of the picture element information plus OR patterns Q and Q' in the subscanning direction are obtained by OR circuits 14a-14d, RAM16a-16d, etc. These OR patterns are selected and processed by a CPU20 to obtain each position of the corner of a semiconductor chip 3 and a bonding pad 4. Thus an accurate detection for a shift of position is feasible.
JP9678380A 1980-07-15 1980-07-15 Position detector Pending JPS5720877A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9678380A JPS5720877A (en) 1980-07-15 1980-07-15 Position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9678380A JPS5720877A (en) 1980-07-15 1980-07-15 Position detector

Publications (1)

Publication Number Publication Date
JPS5720877A true JPS5720877A (en) 1982-02-03

Family

ID=14174227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9678380A Pending JPS5720877A (en) 1980-07-15 1980-07-15 Position detector

Country Status (1)

Country Link
JP (1) JPS5720877A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607308A (en) * 1983-06-28 1985-01-16 Nec Corp Detecting device of address-window
JPS61153503A (en) * 1984-12-26 1986-07-12 Nec Kansai Ltd Detecting method of position of work
JPS6290778A (en) * 1985-10-17 1987-04-25 Rohm Co Ltd Pattern recognizing method
JPS62155987A (en) * 1985-12-27 1987-07-10 Hitachi Plant Eng & Constr Co Ltd Treatment method for dithionic acid-containing wastewater in which nitrite ions coexist

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607308A (en) * 1983-06-28 1985-01-16 Nec Corp Detecting device of address-window
JPS61153503A (en) * 1984-12-26 1986-07-12 Nec Kansai Ltd Detecting method of position of work
JPS6290778A (en) * 1985-10-17 1987-04-25 Rohm Co Ltd Pattern recognizing method
JPS62155987A (en) * 1985-12-27 1987-07-10 Hitachi Plant Eng & Constr Co Ltd Treatment method for dithionic acid-containing wastewater in which nitrite ions coexist

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