JPS57209676A - Washing and drying device - Google Patents

Washing and drying device

Info

Publication number
JPS57209676A
JPS57209676A JP9580281A JP9580281A JPS57209676A JP S57209676 A JPS57209676 A JP S57209676A JP 9580281 A JP9580281 A JP 9580281A JP 9580281 A JP9580281 A JP 9580281A JP S57209676 A JPS57209676 A JP S57209676A
Authority
JP
Japan
Prior art keywords
washing
drying device
drying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9580281A
Other languages
Japanese (ja)
Other versions
JPS5939162B2 (en
Inventor
Masakado Izumo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daikin Industries Ltd
Original Assignee
Daikin Industries Ltd
Daikin Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daikin Industries Ltd, Daikin Kogyo Co Ltd filed Critical Daikin Industries Ltd
Priority to JP9580281A priority Critical patent/JPS5939162B2/en
Publication of JPS57209676A publication Critical patent/JPS57209676A/en
Publication of JPS5939162B2 publication Critical patent/JPS5939162B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Drying Of Solid Materials (AREA)
  • Extraction Or Liquid Replacement (AREA)
JP9580281A 1981-06-20 1981-06-20 washing drying equipment Expired JPS5939162B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9580281A JPS5939162B2 (en) 1981-06-20 1981-06-20 washing drying equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9580281A JPS5939162B2 (en) 1981-06-20 1981-06-20 washing drying equipment

Publications (2)

Publication Number Publication Date
JPS57209676A true JPS57209676A (en) 1982-12-23
JPS5939162B2 JPS5939162B2 (en) 1984-09-21

Family

ID=14147557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9580281A Expired JPS5939162B2 (en) 1981-06-20 1981-06-20 washing drying equipment

Country Status (1)

Country Link
JP (1) JPS5939162B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254443A (en) * 1985-07-01 1987-03-10 F S I Japan Kk Process and device for drying wafers
JPH02111011A (en) * 1988-10-20 1990-04-24 Yosuke Yamada Drainage of water and apparatus therefor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2095949T3 (en) * 1990-08-22 1997-03-01 Toshiba Kk CLEANING METHOD.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254443A (en) * 1985-07-01 1987-03-10 F S I Japan Kk Process and device for drying wafers
JPH02111011A (en) * 1988-10-20 1990-04-24 Yosuke Yamada Drainage of water and apparatus therefor

Also Published As

Publication number Publication date
JPS5939162B2 (en) 1984-09-21

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