JPS572171B2 - - Google Patents

Info

Publication number
JPS572171B2
JPS572171B2 JP14162678A JP14162678A JPS572171B2 JP S572171 B2 JPS572171 B2 JP S572171B2 JP 14162678 A JP14162678 A JP 14162678A JP 14162678 A JP14162678 A JP 14162678A JP S572171 B2 JPS572171 B2 JP S572171B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14162678A
Other versions
JPS5568628A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14162678A priority Critical patent/JPS5568628A/ja
Publication of JPS5568628A publication Critical patent/JPS5568628A/ja
Publication of JPS572171B2 publication Critical patent/JPS572171B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP14162678A 1978-11-16 1978-11-16 Contactless vacuum seal Granted JPS5568628A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14162678A JPS5568628A (en) 1978-11-16 1978-11-16 Contactless vacuum seal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14162678A JPS5568628A (en) 1978-11-16 1978-11-16 Contactless vacuum seal

Publications (2)

Publication Number Publication Date
JPS5568628A JPS5568628A (en) 1980-05-23
JPS572171B2 true JPS572171B2 (ja) 1982-01-14

Family

ID=15296406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14162678A Granted JPS5568628A (en) 1978-11-16 1978-11-16 Contactless vacuum seal

Country Status (1)

Country Link
JP (1) JPS5568628A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60834A (ja) * 1983-06-16 1985-01-05 山本　惣一 籾摺装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5713506A (en) * 1995-12-14 1998-02-03 General Electric Company Vacuum holding rotary welding fixture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60834A (ja) * 1983-06-16 1985-01-05 山本　惣一 籾摺装置

Also Published As

Publication number Publication date
JPS5568628A (en) 1980-05-23

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