JPS572787B2 - - Google Patents
Info
- Publication number
- JPS572787B2 JPS572787B2 JP9820179A JP9820179A JPS572787B2 JP S572787 B2 JPS572787 B2 JP S572787B2 JP 9820179 A JP9820179 A JP 9820179A JP 9820179 A JP9820179 A JP 9820179A JP S572787 B2 JPS572787 B2 JP S572787B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9820179A JPS5623276A (en) | 1979-07-31 | 1979-07-31 | Dry etching method |
| DE8080302564T DE3071299D1 (en) | 1979-07-31 | 1980-07-28 | Dry etching of metal film |
| EP80302564A EP0023429B1 (en) | 1979-07-31 | 1980-07-28 | Dry etching of metal film |
| CA000357204A CA1136525A (en) | 1979-07-31 | 1980-07-29 | Dry etching of metal film |
| IE1592/80A IE50996B1 (en) | 1979-07-31 | 1980-07-30 | Dry etching of metal film |
| US06/174,140 US4350563A (en) | 1979-07-31 | 1980-07-31 | Dry etching of metal film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9820179A JPS5623276A (en) | 1979-07-31 | 1979-07-31 | Dry etching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5623276A JPS5623276A (en) | 1981-03-05 |
| JPS572787B2 true JPS572787B2 (2) | 1982-01-18 |
Family
ID=14213381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9820179A Granted JPS5623276A (en) | 1979-07-31 | 1979-07-31 | Dry etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5623276A (2) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5891171A (ja) * | 1981-11-27 | 1983-05-31 | Kokusai Electric Co Ltd | アルミニウムおよびアルミニウム合金のプラズマエツチング方法 |
| JPS58213877A (ja) * | 1982-06-05 | 1983-12-12 | Anelva Corp | アルミニウムのドライエツチング方法 |
| CN112103167A (zh) * | 2020-09-28 | 2020-12-18 | 上海华虹宏力半导体制造有限公司 | 干法刻蚀工艺方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54158343A (en) * | 1978-06-05 | 1979-12-14 | Hitachi Ltd | Dry etching method for al and al alloy |
-
1979
- 1979-07-31 JP JP9820179A patent/JPS5623276A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5623276A (en) | 1981-03-05 |