JPS5730253A - Secondary electron detector for scan type electron microscope - Google Patents

Secondary electron detector for scan type electron microscope

Info

Publication number
JPS5730253A
JPS5730253A JP10551680A JP10551680A JPS5730253A JP S5730253 A JPS5730253 A JP S5730253A JP 10551680 A JP10551680 A JP 10551680A JP 10551680 A JP10551680 A JP 10551680A JP S5730253 A JPS5730253 A JP S5730253A
Authority
JP
Japan
Prior art keywords
electrode
acceleration
pipe
electron beam
circumference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10551680A
Other languages
Japanese (ja)
Inventor
Nobuaki Tamura
Susumu Takashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to AU48510/79A priority Critical patent/AU521225B2/en
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP10551680A priority patent/JPS5730253A/en
Priority to DE3126575A priority patent/DE3126575C2/en
Priority to GB8122416A priority patent/GB2081501B/en
Priority to KR1019810002642A priority patent/KR850001390B1/en
Priority to US06/286,056 priority patent/US4442355A/en
Priority to FR8114891A priority patent/FR2488044A1/en
Publication of JPS5730253A publication Critical patent/JPS5730253A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D319/00—Heterocyclic compounds containing six-membered rings having two oxygen atoms as the only ring hetero atoms
    • C07D319/10—1,4-Dioxanes; Hydrogenated 1,4-dioxanes
    • C07D319/14—1,4-Dioxanes; Hydrogenated 1,4-dioxanes condensed with carbocyclic rings or ring systems
    • C07D319/16—1,4-Dioxanes; Hydrogenated 1,4-dioxanes condensed with carbocyclic rings or ring systems condensed with one six-membered ring
    • C07D319/18—Ethylenedioxybenzenes, not substituted on the hetero ring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/418—Imaging electron microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/50—Detectors
    • G01N2223/505—Detectors scintillation
    • G01N2223/5055—Detectors scintillation scintillation crystal coupled to PMT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To produce a high quality picture image by providing a pipe shaped electrode at the circumference of the optical axis in the proximity of a scintillator while providing an electrode for catching the secondary electron at the circumference of said electrode thereby providing sufficient focusing function of the secondary electron. CONSTITUTION:The output from a D.C. power source 13 is applied on a pipe 12 for preventing the deflection of low acceleration specimen irradiating electron beam and a tubular electrode 13 at the outside. A conductive mesh 15 is provided below and between said pipe 12 and said electrode 13. Even if the objective lens field is weakened and the focusing of the secondary electrode is insufficient, the secondary electron is focused upwardly by the electric field formed by said mesh 15 to reach the region where it is subjected to the acceleration electric field due to the ring electrode 9 thus to enter into a scintillator. While even when the acceleration voltage of the specimen irradiating electron beam is low, the deflection of the electron beam due to the acceleration is prevented because a pipe 12 is provided on the circumference of the electron beam where the acceleration field will influence.
JP10551680A 1977-04-19 1980-07-31 Secondary electron detector for scan type electron microscope Pending JPS5730253A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
AU48510/79A AU521225B2 (en) 1977-04-19 1979-06-28 Alkylenedioxy phenyl derivatives
JP10551680A JPS5730253A (en) 1979-06-28 1980-07-31 Secondary electron detector for scan type electron microscope
DE3126575A DE3126575C2 (en) 1979-06-28 1981-07-06 Device for detecting the secondary electrons in a scanning electron microscope
GB8122416A GB2081501B (en) 1979-06-28 1981-07-21 Device for detecting secondary electrons in a scanning electron microscope
KR1019810002642A KR850001390B1 (en) 1980-07-31 1981-07-21 Secondary Electronic Detection Device
US06/286,056 US4442355A (en) 1980-07-31 1981-07-22 Device for detecting secondary electrons in a scanning electron microscope
FR8114891A FR2488044A1 (en) 1979-06-28 1981-07-30 DEVICE FOR DETECTING SECONDARY ELECTRONS IN A SCANNING ELECTRON MICROSCOPE

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AU48510/79A AU521225B2 (en) 1977-04-19 1979-06-28 Alkylenedioxy phenyl derivatives
JP10551680A JPS5730253A (en) 1979-06-28 1980-07-31 Secondary electron detector for scan type electron microscope

Publications (1)

Publication Number Publication Date
JPS5730253A true JPS5730253A (en) 1982-02-18

Family

ID=25628249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10551680A Pending JPS5730253A (en) 1977-04-19 1980-07-31 Secondary electron detector for scan type electron microscope

Country Status (5)

Country Link
JP (1) JPS5730253A (en)
AU (1) AU521225B2 (en)
DE (1) DE3126575C2 (en)
FR (1) FR2488044A1 (en)
GB (1) GB2081501B (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148867U (en) * 1982-03-30 1983-10-06 株式会社島津製作所 Secondary electron detection device
JPS60154416A (en) * 1984-01-23 1985-08-14 昭和電線電纜株式会社 Method of producing high foamable polyethylene insulated wire
WO1985004757A1 (en) * 1984-04-06 1985-10-24 Hitachi, Ltd. Secondary electron detector
JPS6237112U (en) * 1985-08-23 1987-03-05
JPH02291609A (en) * 1989-05-01 1990-12-03 Sumitomo Electric Ind Ltd Insulated wire, its manufacturing method, and coaxial insulated wire
JPH03146532A (en) * 1989-11-02 1991-06-21 Ube Ind Ltd Expandable polyolefin resin composition for covering electric wires

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58161235A (en) * 1982-03-19 1983-09-24 Internatl Precision Inc Scanning type electron beam device
GB8327737D0 (en) * 1983-10-17 1983-11-16 Texas Instruments Ltd Electron detector
EP0274622B1 (en) * 1986-12-12 1990-11-07 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Detector assembly with detector objective for corpuscular ray instruments
JP3081393B2 (en) * 1992-10-15 2000-08-28 株式会社日立製作所 Scanning electron microscope
DE19729526C2 (en) * 1997-07-10 1999-07-22 Frank Siegelin Heated sample table for in-situ imaging in scanning electron microscopes at high temperatures
KR20010073099A (en) 1998-09-03 2001-07-31 히라타 다다시 Oxygenic heterocyclic compounds
GB2367686B (en) * 2000-08-10 2002-12-11 Leo Electron Microscopy Ltd Improvements in or relating to particle detectors
GB2442027B (en) * 2006-09-23 2009-08-26 Zeiss Carl Smt Ltd Charged particle beam instrument and method of detecting charged particles
CN115662866B (en) * 2022-11-29 2023-03-14 北京中科科仪股份有限公司 Secondary electron detection device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1128107A (en) * 1965-06-23 1968-09-25 Hitachi Ltd Scanning electron microscope
GB1304344A (en) * 1969-02-01 1973-01-24
JPS4936496B1 (en) * 1970-04-18 1974-10-01

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148867U (en) * 1982-03-30 1983-10-06 株式会社島津製作所 Secondary electron detection device
JPS60154416A (en) * 1984-01-23 1985-08-14 昭和電線電纜株式会社 Method of producing high foamable polyethylene insulated wire
WO1985004757A1 (en) * 1984-04-06 1985-10-24 Hitachi, Ltd. Secondary electron detector
JPS6237112U (en) * 1985-08-23 1987-03-05
JPH02291609A (en) * 1989-05-01 1990-12-03 Sumitomo Electric Ind Ltd Insulated wire, its manufacturing method, and coaxial insulated wire
JPH03146532A (en) * 1989-11-02 1991-06-21 Ube Ind Ltd Expandable polyolefin resin composition for covering electric wires

Also Published As

Publication number Publication date
FR2488044B1 (en) 1985-01-04
AU521225B2 (en) 1982-03-25
GB2081501B (en) 1984-05-31
GB2081501A (en) 1982-02-17
FR2488044A1 (en) 1982-02-05
DE3126575A1 (en) 1982-04-22
DE3126575C2 (en) 1984-07-26
AU4851079A (en) 1979-10-25

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