JPS5730812A - Formation of optical fiber connecting groove - Google Patents

Formation of optical fiber connecting groove

Info

Publication number
JPS5730812A
JPS5730812A JP10592180A JP10592180A JPS5730812A JP S5730812 A JPS5730812 A JP S5730812A JP 10592180 A JP10592180 A JP 10592180A JP 10592180 A JP10592180 A JP 10592180A JP S5730812 A JPS5730812 A JP S5730812A
Authority
JP
Japan
Prior art keywords
film
substrate
grooves
fibers
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10592180A
Other languages
Japanese (ja)
Other versions
JPS5933883B2 (en
Inventor
Hiroyasu Sugiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10592180A priority Critical patent/JPS5933883B2/en
Publication of JPS5730812A publication Critical patent/JPS5730812A/en
Publication of JPS5933883B2 publication Critical patent/JPS5933883B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807—Dismountable connectors, i.e. comprising plugs
    • G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
    • G02B6/3834—Means for centering or aligning the light guide within the ferrule
    • G02B6/3838—Means for centering or aligning the light guide within the ferrule using grooves for light guides
    • G02B6/3839—Means for centering or aligning the light guide within the ferrule using grooves for light guides for a plurality of light guides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Coupling Of Light Guides (AREA)

Abstract

PURPOSE:To connect optical fibers at a low loss with high accuracy by selectively removing the prescribed positions of a photoresist film provided on a substrate surface for optical fiber connection, using the same as a mask, plasma etching the substrate and forming U-shaped fiber connecting grooves. CONSTITUTION:The surface of a silicon substrate 21 polished to a specular surface is thermally oxidized to form a silicon oxide film 22 to 0.5-1mu thicknesses, thereafter a photoresist film 23 is formed on the film 22. The film 23 is then selectively removed to form opening parts 24 which serve as guide grooves. Thence, with the film 23 as a mask, the SiO2 film 22 and the substrate 1 are subjected to plasma etching by using an etching gas consisting of adding a slight amount of O2 to gaseous CF4, whereby U-shaped grooves 25 of a semicircular shape in section are formed. Thereafter, the resist film 23 is removed, and this yields a connector for the purpose of connecting fibers 26. Since the fibers 26 makes face contact with the grooves 25, the connection is accomplished at a low loss with good accuracy.
JP10592180A 1980-07-31 1980-07-31 How to form an optical fiber connection groove Expired JPS5933883B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10592180A JPS5933883B2 (en) 1980-07-31 1980-07-31 How to form an optical fiber connection groove

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10592180A JPS5933883B2 (en) 1980-07-31 1980-07-31 How to form an optical fiber connection groove

Publications (2)

Publication Number Publication Date
JPS5730812A true JPS5730812A (en) 1982-02-19
JPS5933883B2 JPS5933883B2 (en) 1984-08-18

Family

ID=14420321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10592180A Expired JPS5933883B2 (en) 1980-07-31 1980-07-31 How to form an optical fiber connection groove

Country Status (1)

Country Link
JP (1) JPS5933883B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4678662A (en) * 1985-10-09 1987-07-07 Monsanto Company Pyrophosphate coating process for calcium carbonate dental abrasives
JPS6326807U (en) * 1986-08-07 1988-02-22
KR100425100B1 (en) * 2001-08-27 2004-03-30 엘지전자 주식회사 fabrication method for groove by dry-etching and optic communication device using the Method
CN103837938A (en) * 2012-11-20 2014-06-04 上海华虹宏力半导体制造有限公司 Fiber alignment device and manufacturing method thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103018848B (en) * 2013-01-23 2015-02-04 无锡创润传感科技有限公司 Manufacturing method of optical fiber array positioning assembly

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4678662A (en) * 1985-10-09 1987-07-07 Monsanto Company Pyrophosphate coating process for calcium carbonate dental abrasives
JPS6326807U (en) * 1986-08-07 1988-02-22
KR100425100B1 (en) * 2001-08-27 2004-03-30 엘지전자 주식회사 fabrication method for groove by dry-etching and optic communication device using the Method
CN103837938A (en) * 2012-11-20 2014-06-04 上海华虹宏力半导体制造有限公司 Fiber alignment device and manufacturing method thereof

Also Published As

Publication number Publication date
JPS5933883B2 (en) 1984-08-18

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