JPS5739364A - Thermal resistance measuring method of semiconductor device - Google Patents
Thermal resistance measuring method of semiconductor deviceInfo
- Publication number
- JPS5739364A JPS5739364A JP11497280A JP11497280A JPS5739364A JP S5739364 A JPS5739364 A JP S5739364A JP 11497280 A JP11497280 A JP 11497280A JP 11497280 A JP11497280 A JP 11497280A JP S5739364 A JPS5739364 A JP S5739364A
- Authority
- JP
- Japan
- Prior art keywords
- thermal resistance
- chip
- heat
- lamp
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
PURPOSE:To exactly discriminate the variance of thermal resistance in a short time, by applying a great deal of heat to a semiconductor from the outside, and measuring a temperature in the inside of a chip. CONSTITUTION:A radiation fin 4 is heated by an infrared lamp from the outside. After the lamp has been lighted, a temperature of a chip is measured by utilizing P-N junction in a chip 2 after some time has elapsed. Heat which has been applied by the lamp 6 is transmitted through a path as R3 C3 R2 R1 C1, being scarcely influenced by a capacitor C4 of an equivalent circuit of a thermal flow. Accordingly, the higher a temperature of the chip rises after (t) time, the lower the thermal resistance is. When the quantity of heat from the lamp is increased, the quantity of heat passing through the thermal resistance Ri (i=1-3) is increased, a temperature difference is increased even if a difference of the thermal resistance is small, and the detecting sensitivity becomes high. Also, heat passes through almost all radiation routes which become important when they are used actually, and attains to the chip 2, therefore, the decision is executed very exactly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11497280A JPS5739364A (en) | 1980-08-20 | 1980-08-20 | Thermal resistance measuring method of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11497280A JPS5739364A (en) | 1980-08-20 | 1980-08-20 | Thermal resistance measuring method of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5739364A true JPS5739364A (en) | 1982-03-04 |
Family
ID=14651178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11497280A Pending JPS5739364A (en) | 1980-08-20 | 1980-08-20 | Thermal resistance measuring method of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5739364A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5960574U (en) * | 1982-10-15 | 1984-04-20 | 日本電気ホームエレクトロニクス株式会社 | Thermal resistance measuring device |
| WO1992010742A1 (en) * | 1990-12-14 | 1992-06-25 | Anritsu Corporation | Sensing system for measuring characteristic value of member to be measured by utilizing changes in thermal resistance |
| US8350263B2 (en) | 2009-11-02 | 2013-01-08 | Shinko Electric Industries Co., Ltd. | Semiconductor package, method of evaluating same, and method of manufacturing same |
-
1980
- 1980-08-20 JP JP11497280A patent/JPS5739364A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5960574U (en) * | 1982-10-15 | 1984-04-20 | 日本電気ホームエレクトロニクス株式会社 | Thermal resistance measuring device |
| WO1992010742A1 (en) * | 1990-12-14 | 1992-06-25 | Anritsu Corporation | Sensing system for measuring characteristic value of member to be measured by utilizing changes in thermal resistance |
| US5251980A (en) * | 1990-12-14 | 1993-10-12 | Anritsu Corporation | Sensing system for measuring specific value of substance to be measured by utilizing change in thermal resistance |
| US8350263B2 (en) | 2009-11-02 | 2013-01-08 | Shinko Electric Industries Co., Ltd. | Semiconductor package, method of evaluating same, and method of manufacturing same |
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