JPS5742004A - Optical scanning mirror - Google Patents

Optical scanning mirror

Info

Publication number
JPS5742004A
JPS5742004A JP55118034A JP11803480A JPS5742004A JP S5742004 A JPS5742004 A JP S5742004A JP 55118034 A JP55118034 A JP 55118034A JP 11803480 A JP11803480 A JP 11803480A JP S5742004 A JPS5742004 A JP S5742004A
Authority
JP
Japan
Prior art keywords
planes
silicon wafer
production steps
polyhedron
optical scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55118034A
Other languages
English (en)
Other versions
JPS614090B2 (ja
Inventor
Akira Ote
Muneki Ran
Hideto Iwaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Electric Corp
Priority to JP55118034A priority Critical patent/JPS5742004A/ja
Publication of JPS5742004A publication Critical patent/JPS5742004A/ja
Publication of JPS614090B2 publication Critical patent/JPS614090B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP55118034A 1980-08-27 1980-08-27 Optical scanning mirror Granted JPS5742004A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55118034A JPS5742004A (en) 1980-08-27 1980-08-27 Optical scanning mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55118034A JPS5742004A (en) 1980-08-27 1980-08-27 Optical scanning mirror

Publications (2)

Publication Number Publication Date
JPS5742004A true JPS5742004A (en) 1982-03-09
JPS614090B2 JPS614090B2 (ja) 1986-02-06

Family

ID=14726404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55118034A Granted JPS5742004A (en) 1980-08-27 1980-08-27 Optical scanning mirror

Country Status (1)

Country Link
JP (1) JPS5742004A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6137121A (en) * 1997-10-01 2000-10-24 Mitsubishi Denki Kabushiki Kaisha Integrated semiconductor light generating and detecting device
JP2006039046A (ja) * 2004-07-23 2006-02-09 Shinko Electric Ind Co Ltd 光導波路装着部材、基板、半導体装置、光導波路装着部材の製造方法、及び基板の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6137121A (en) * 1997-10-01 2000-10-24 Mitsubishi Denki Kabushiki Kaisha Integrated semiconductor light generating and detecting device
JP2006039046A (ja) * 2004-07-23 2006-02-09 Shinko Electric Ind Co Ltd 光導波路装着部材、基板、半導体装置、光導波路装着部材の製造方法、及び基板の製造方法

Also Published As

Publication number Publication date
JPS614090B2 (ja) 1986-02-06

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