JPS574531A - Manufacture of electrostatic capacity type pressure sensor - Google Patents

Manufacture of electrostatic capacity type pressure sensor

Info

Publication number
JPS574531A
JPS574531A JP7860180A JP7860180A JPS574531A JP S574531 A JPS574531 A JP S574531A JP 7860180 A JP7860180 A JP 7860180A JP 7860180 A JP7860180 A JP 7860180A JP S574531 A JPS574531 A JP S574531A
Authority
JP
Japan
Prior art keywords
sheet
ink
electrostatic capacity
united
coated layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7860180A
Other languages
Japanese (ja)
Other versions
JPS639174B2 (en
Inventor
Toru Ishida
Toshibumi Kamiyama
Jun Yasuda
Akinobu Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7860180A priority Critical patent/JPS574531A/en
Publication of JPS574531A publication Critical patent/JPS574531A/en
Publication of JPS639174B2 publication Critical patent/JPS639174B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To make the electrostatic capacity change correspond to the absolute pressure and improve the reliability of an electrostatic capacity type pressure sensor, by a method wherein electrode layers are united with a vaporizing substance therebetween and baked. CONSTITUTION:Tungsten ink is circularly printed on one surface of an unbaked alumina sheet 1 to form an ink-coated layer 2. Moreover, tungsten ink is circularly printed on one surface of an unbaked alumina sheet 3 to form an ink-coated layer 4. Conducting parts 5 and 6 are formed on the peripheral parts of the sheet 3. In addition, an exhaust hole 7 and a tungsten ink-coated layer 8 are formed on the sheet 3. Then, the sheet 1, a butyral resin film 9 and the sheet 3 are piled up and united by a thermal pressure welding. By baking said united structure in a mixed gas atmosphere, the sheets 1 and 3 are baked integrally to become an alumina diaphragm 10, and a hollow 11 is formed thereinside by the vaporization of the film 9. Electrodes 12 and 13 are formed on the upper and lower surfaces of the hollow 11, and the outside air pressure is detected according to the electrostatic capacity between said electrodes.
JP7860180A 1980-06-10 1980-06-10 Manufacture of electrostatic capacity type pressure sensor Granted JPS574531A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7860180A JPS574531A (en) 1980-06-10 1980-06-10 Manufacture of electrostatic capacity type pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7860180A JPS574531A (en) 1980-06-10 1980-06-10 Manufacture of electrostatic capacity type pressure sensor

Publications (2)

Publication Number Publication Date
JPS574531A true JPS574531A (en) 1982-01-11
JPS639174B2 JPS639174B2 (en) 1988-02-26

Family

ID=13666414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7860180A Granted JPS574531A (en) 1980-06-10 1980-06-10 Manufacture of electrostatic capacity type pressure sensor

Country Status (1)

Country Link
JP (1) JPS574531A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6035609A (en) * 1983-08-06 1985-02-23 Ohtsu Tire & Rubber Co Ltd Radial tire
JPS63292032A (en) * 1987-05-26 1988-11-29 Ngk Insulators Ltd Pressure detector
JPH03501060A (en) * 1989-03-21 1991-03-07 エンドレス　ウント　ハウザー　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング　ウント　コンパニー Capacitive pressure sensor and its manufacturing method
US5214961A (en) * 1990-08-28 1993-06-01 Ngk Spark Plug Co., Ltd. Pressure sensor
JPH09346U (en) * 1986-02-10 1997-06-10 マレリ・オートロニカ・ソシエタ・ペル・アチオニ Electrical parts that are mechanically connected
US6543503B2 (en) 1997-06-13 2003-04-08 Bridgestone Corporation Heavy duty pneumatic radial tires with organic fiber cord bead reinforcing layer
JP2008180695A (en) * 2006-12-25 2008-08-07 Kyocera Corp PACKAGE FOR PRESSURE SENSOR, MANUFACTURING METHOD THEREOF, AND PRESSURE SENSOR
JP2010008115A (en) * 2008-06-25 2010-01-14 Kyocera Corp Base for pressure detection apparatus and pressure-detecting apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6035609A (en) * 1983-08-06 1985-02-23 Ohtsu Tire & Rubber Co Ltd Radial tire
JPH09346U (en) * 1986-02-10 1997-06-10 マレリ・オートロニカ・ソシエタ・ペル・アチオニ Electrical parts that are mechanically connected
JPS63292032A (en) * 1987-05-26 1988-11-29 Ngk Insulators Ltd Pressure detector
JPH03501060A (en) * 1989-03-21 1991-03-07 エンドレス　ウント　ハウザー　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング　ウント　コンパニー Capacitive pressure sensor and its manufacturing method
US5214961A (en) * 1990-08-28 1993-06-01 Ngk Spark Plug Co., Ltd. Pressure sensor
US6543503B2 (en) 1997-06-13 2003-04-08 Bridgestone Corporation Heavy duty pneumatic radial tires with organic fiber cord bead reinforcing layer
JP2008180695A (en) * 2006-12-25 2008-08-07 Kyocera Corp PACKAGE FOR PRESSURE SENSOR, MANUFACTURING METHOD THEREOF, AND PRESSURE SENSOR
JP2010008115A (en) * 2008-06-25 2010-01-14 Kyocera Corp Base for pressure detection apparatus and pressure-detecting apparatus

Also Published As

Publication number Publication date
JPS639174B2 (en) 1988-02-26

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