JPS574543A - Manufacture of titanium oxide thin film - Google Patents

Manufacture of titanium oxide thin film

Info

Publication number
JPS574543A
JPS574543A JP7860680A JP7860680A JPS574543A JP S574543 A JPS574543 A JP S574543A JP 7860680 A JP7860680 A JP 7860680A JP 7860680 A JP7860680 A JP 7860680A JP S574543 A JPS574543 A JP S574543A
Authority
JP
Japan
Prior art keywords
thin film
tio2
grains
minute
responce
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7860680A
Other languages
Japanese (ja)
Inventor
Hozumi Hirota
Mitsuhiro Otani
Tomu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7860680A priority Critical patent/JPS574543A/en
Publication of JPS574543A publication Critical patent/JPS574543A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To readily obtain a TiO2 thin film in which minute Pt grains have been uniformly scattered, suitable for manufacturing an oxygen sensor excellent in responce, by a method wherein a Ti-Pt alloy thin film containing a desired amount of Pt is provided on a substrate, and thermally oxidized thereafter. CONSTITUTION:On a sufficiently washed substrate 1 of alumina or the like, a Ti-Pt alloy thin film containing a desired amount of Pt is deposited in an evaporation manner by an electron beam heating. Then, said Ti-Pt thin film is heated to around 1,200 deg.C in the atmospheric air for thermal oxidation in order to form a TiO2 thin film 2 in which minute Pt grains have been uniformly scattered. Then, platinum is deposited by evaporation to form electrodes 4. Moreover, lead wire welding lands 3 made of Pt thick film, Pt lead wires 5 and the like are provided to obtain an oxygen sensor element excellent in responce. In addition, because the minute Pt grains in the TiO2 thin film have been held in the matrix of the TiO2, there is no possibility that they become coarse in the process of use.
JP7860680A 1980-06-10 1980-06-10 Manufacture of titanium oxide thin film Pending JPS574543A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7860680A JPS574543A (en) 1980-06-10 1980-06-10 Manufacture of titanium oxide thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7860680A JPS574543A (en) 1980-06-10 1980-06-10 Manufacture of titanium oxide thin film

Publications (1)

Publication Number Publication Date
JPS574543A true JPS574543A (en) 1982-01-11

Family

ID=13666538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7860680A Pending JPS574543A (en) 1980-06-10 1980-06-10 Manufacture of titanium oxide thin film

Country Status (1)

Country Link
JP (1) JPS574543A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924670U (en) * 1982-08-07 1984-02-15 愛知車輌株式会社 Travel direction display device for self-propelled aerial work vehicles
JPS5992266A (en) * 1982-11-16 1984-05-28 Fuji Heavy Ind Ltd Indicator of turning direction of helm of automobile

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924670U (en) * 1982-08-07 1984-02-15 愛知車輌株式会社 Travel direction display device for self-propelled aerial work vehicles
JPS5992266A (en) * 1982-11-16 1984-05-28 Fuji Heavy Ind Ltd Indicator of turning direction of helm of automobile

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