JPS575122A - Flow rate control system - Google Patents
Flow rate control systemInfo
- Publication number
- JPS575122A JPS575122A JP7722580A JP7722580A JPS575122A JP S575122 A JPS575122 A JP S575122A JP 7722580 A JP7722580 A JP 7722580A JP 7722580 A JP7722580 A JP 7722580A JP S575122 A JPS575122 A JP S575122A
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- signal
- controller
- pressure
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
- G05D16/2046—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures
- G05D16/2053—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures the plurality of throttling means comprising only a first throttling means acting on a higher pressure and a second throttling means acting on a lower pressure, e.g. the atmosphere
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Control Of Fluid Pressure (AREA)
Abstract
PURPOSE:To prevent treated products in a treating chamber from being broken down and contaminated by setting the initial flow rate of a fluid low, by increasing it gradually up to a desired value, and by controlling an exhaust control valve in the period so that pressure in the treating chamber reaches a prescribed value. CONSTITUTION:A controller 6 opens a displacement control valve fully by a control signal 9, sets a flow rate O with a flow setting signal 8, and drives an exhaust pump 1 with a driving signal 12 to discharge the 1st gas in a treating chamber 4. The exhaust state is detected by a pressure sensor 2 to be informed with its output signal 10 and when the pressure decreased below a certain value, the controller 6 sends a signal 8, indicating a fine flow rate, to a mass flow controller 5. The designated flow rate of the 2nd gas is supplied from an inlet 11 to the chamber 4, wherein the pressure rises. The signal 6 control the control valve 3 by a signal 9 to hold the prescribed pressure in the chamber 4. The controller 6 further increases the set flow rate to the mass controller 5 a certain time later, controls the control valve 3 so tht the pressure in the chamber 4 has the prescribed value, and further increases the flow rate of gas successively up to a desired flow rate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7722580A JPS575122A (en) | 1980-06-10 | 1980-06-10 | Flow rate control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7722580A JPS575122A (en) | 1980-06-10 | 1980-06-10 | Flow rate control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS575122A true JPS575122A (en) | 1982-01-11 |
Family
ID=13627904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7722580A Pending JPS575122A (en) | 1980-06-10 | 1980-06-10 | Flow rate control system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS575122A (en) |
-
1980
- 1980-06-10 JP JP7722580A patent/JPS575122A/en active Pending
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