JPS5752148A - Image sensor testing device - Google Patents

Image sensor testing device

Info

Publication number
JPS5752148A
JPS5752148A JP55128256A JP12825680A JPS5752148A JP S5752148 A JPS5752148 A JP S5752148A JP 55128256 A JP55128256 A JP 55128256A JP 12825680 A JP12825680 A JP 12825680A JP S5752148 A JPS5752148 A JP S5752148A
Authority
JP
Japan
Prior art keywords
output
light
image sensor
converter
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55128256A
Other languages
Japanese (ja)
Inventor
Hideyuki Tsujimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55128256A priority Critical patent/JPS5752148A/en
Publication of JPS5752148A publication Critical patent/JPS5752148A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

PURPOSE:To accurately judge the respective test items in a short time by maintining the quantity of light from a light source constantly by a monitor photodetector, inputting an output from an image sensor as a specimen to a differential amplifier and digitally processing it. CONSTITUTION:A light source E1 is controlled by a light quantity control circuit F1 connected to a monitor photodetector E5 to maintain the quantity of light constantly, the light is emitted to a CCD E3 having a photoelectric converter as a specimen, a reference level output CC1 and a photoelectric conversion output CC2 are inputted through the first sample holding circuit F4 to a differential ampli fier F3, the output from the amplifier F3 is in turn inputted through the second sample holding circuit F5 to an A/D converter F6, the output from the converter F6 is then processed by a digital data processor G3, is then compared with a preset numerical value by a discriminator G4, thereby judging the testing items. In this manner, the test of the image sensor can be accurately performed in a short time.
JP55128256A 1980-09-16 1980-09-16 Image sensor testing device Pending JPS5752148A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55128256A JPS5752148A (en) 1980-09-16 1980-09-16 Image sensor testing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55128256A JPS5752148A (en) 1980-09-16 1980-09-16 Image sensor testing device

Publications (1)

Publication Number Publication Date
JPS5752148A true JPS5752148A (en) 1982-03-27

Family

ID=14980350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55128256A Pending JPS5752148A (en) 1980-09-16 1980-09-16 Image sensor testing device

Country Status (1)

Country Link
JP (1) JPS5752148A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59163861A (en) * 1983-03-09 1984-09-14 Hitachi Electronics Eng Co Ltd Detector for white flaw and black flaw of solid-state image pickup element
JP2007208253A (en) * 2006-01-09 2007-08-16 Samsung Electronics Co Ltd Image sensor test method and apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59163861A (en) * 1983-03-09 1984-09-14 Hitachi Electronics Eng Co Ltd Detector for white flaw and black flaw of solid-state image pickup element
JP2007208253A (en) * 2006-01-09 2007-08-16 Samsung Electronics Co Ltd Image sensor test method and apparatus

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