JPS5752149A - Conveying device for wafer - Google Patents

Conveying device for wafer

Info

Publication number
JPS5752149A
JPS5752149A JP55127220A JP12722080A JPS5752149A JP S5752149 A JPS5752149 A JP S5752149A JP 55127220 A JP55127220 A JP 55127220A JP 12722080 A JP12722080 A JP 12722080A JP S5752149 A JPS5752149 A JP S5752149A
Authority
JP
Japan
Prior art keywords
conveying
wafer
magnetic
carrier
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55127220A
Other languages
Japanese (ja)
Inventor
Kazunori Imai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55127220A priority Critical patent/JPS5752149A/en
Publication of JPS5752149A publication Critical patent/JPS5752149A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3204—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations using magnetic elements

Abstract

PURPOSE:To prevent the dust and to improve the yield of a wafer product by forming a conveying passage made of magnetic mateial for generating a repelling magnetic field on a wafer conveying base and forming a wefer conveying carrier of magnetic material, thereby eliminateing mechanically moving part. CONSTITUTION:The first and second conveying paths 8, 9 made of magnetic material so magnetized as to act repelling force of the same strength are formed on a wafer conveying base 7, a magnetic mateial carrier 11 is floated, an electromagnet 10 is provided on the base 7 to generate and erase a magnetic field, thereby controlling the floating of the carrier. In this manner, the dust can be prevented by eliminating the mechanically moving part, the yield is improved, and the device can be used in vaccum.
JP55127220A 1980-09-16 1980-09-16 Conveying device for wafer Pending JPS5752149A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55127220A JPS5752149A (en) 1980-09-16 1980-09-16 Conveying device for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55127220A JPS5752149A (en) 1980-09-16 1980-09-16 Conveying device for wafer

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP63254716A Division JPH01205438A (en) 1988-10-12 1988-10-12 Magnetic-levitation-type transfer apparatus

Publications (1)

Publication Number Publication Date
JPS5752149A true JPS5752149A (en) 1982-03-27

Family

ID=14954689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55127220A Pending JPS5752149A (en) 1980-09-16 1980-09-16 Conveying device for wafer

Country Status (1)

Country Link
JP (1) JPS5752149A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59176200U (en) * 1983-05-12 1984-11-24 コーア株式会社 Transfer device for small electronic substrates
JPS61240647A (en) * 1985-04-17 1986-10-25 Applied Material Japan Kk Manufacturing equipment for semiconductor
US4766993A (en) * 1985-11-13 1988-08-30 Fuji Electric Co., Ltd. Conveying apparatus
US4805761A (en) * 1987-07-14 1989-02-21 Totsch John W Magnetic conveyor system for transporting wafers
US4877123A (en) * 1987-11-02 1989-10-31 Ichiro Fukuwatari Conveyor means for wafers
US4978253A (en) * 1988-06-08 1990-12-18 Commissariat A L'energie Atomique Air cushion conveying device with magnetic guidance
US5086729A (en) * 1988-06-13 1992-02-11 Asahi Glass Company Ltd. Vacuum processing apparatus and transportation system thereof
US5170714A (en) * 1988-06-13 1992-12-15 Asahi Glass Company, Ltd. Vacuum processing apparatus and transportation system thereof
US5377816A (en) * 1993-07-15 1995-01-03 Materials Research Corp. Spiral magnetic linear translating mechanism
US6183615B1 (en) 1992-06-26 2001-02-06 Tokyo Electron Limited Transport system for wafer processing line

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50124381A (en) * 1974-03-16 1975-09-30
JPS5455176A (en) * 1977-10-11 1979-05-02 Nec Corp Transfer method of semiconductor substrates
JPS557106A (en) * 1978-06-26 1980-01-18 Hitachi Ltd Plate conveyer system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50124381A (en) * 1974-03-16 1975-09-30
JPS5455176A (en) * 1977-10-11 1979-05-02 Nec Corp Transfer method of semiconductor substrates
JPS557106A (en) * 1978-06-26 1980-01-18 Hitachi Ltd Plate conveyer system

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59176200U (en) * 1983-05-12 1984-11-24 コーア株式会社 Transfer device for small electronic substrates
JPS61240647A (en) * 1985-04-17 1986-10-25 Applied Material Japan Kk Manufacturing equipment for semiconductor
US4766993A (en) * 1985-11-13 1988-08-30 Fuji Electric Co., Ltd. Conveying apparatus
US4805761A (en) * 1987-07-14 1989-02-21 Totsch John W Magnetic conveyor system for transporting wafers
US4877123A (en) * 1987-11-02 1989-10-31 Ichiro Fukuwatari Conveyor means for wafers
US4978253A (en) * 1988-06-08 1990-12-18 Commissariat A L'energie Atomique Air cushion conveying device with magnetic guidance
US5086729A (en) * 1988-06-13 1992-02-11 Asahi Glass Company Ltd. Vacuum processing apparatus and transportation system thereof
US5170714A (en) * 1988-06-13 1992-12-15 Asahi Glass Company, Ltd. Vacuum processing apparatus and transportation system thereof
US6183615B1 (en) 1992-06-26 2001-02-06 Tokyo Electron Limited Transport system for wafer processing line
US5377816A (en) * 1993-07-15 1995-01-03 Materials Research Corp. Spiral magnetic linear translating mechanism

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