JPS5753049A - Electron generator - Google Patents

Electron generator

Info

Publication number
JPS5753049A
JPS5753049A JP55127710A JP12771080A JPS5753049A JP S5753049 A JPS5753049 A JP S5753049A JP 55127710 A JP55127710 A JP 55127710A JP 12771080 A JP12771080 A JP 12771080A JP S5753049 A JPS5753049 A JP S5753049A
Authority
JP
Japan
Prior art keywords
electrode
cathode
potential
altering
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55127710A
Other languages
Japanese (ja)
Inventor
Katsuhiro Kageyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55127710A priority Critical patent/JPS5753049A/en
Publication of JPS5753049A publication Critical patent/JPS5753049A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To control the current value of an electron beam which is removed by providing a linear electrode at the cylindrical hollow section of an anode in parallel to the central axis and altering the potential difference between this electrode and the first electrode within an approximately zero range. CONSTITUTION:In a crossed-field discharge type cool cathode electron generator, a linear electrode is arranged at the cylindrical hollow section 1a of an anode 1 in parallel to the central axis. When the first and second cathodes 2 and 3 are kept equipotential and the potential of an electrode 10 is finely and continuously altered within a proper positive range in which the potential difference between the cathode 2 and electrode 10 is almost equal to zero, the cathode current is continuously altered from zero to the maximum. Besides, by assigning the potential of the anode 3 lower than that of the electrode 2 without altering the electrode 10 in this state and altering either of the potential, the current applied to the cathode 2 is altered sharply. As a result, the current value of the electron beam which is removed from the opening 2a of the cathode 2 can be controlled and a stable discharge state be maintained.
JP55127710A 1980-09-13 1980-09-13 Electron generator Pending JPS5753049A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55127710A JPS5753049A (en) 1980-09-13 1980-09-13 Electron generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55127710A JPS5753049A (en) 1980-09-13 1980-09-13 Electron generator

Publications (1)

Publication Number Publication Date
JPS5753049A true JPS5753049A (en) 1982-03-29

Family

ID=14966788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55127710A Pending JPS5753049A (en) 1980-09-13 1980-09-13 Electron generator

Country Status (1)

Country Link
JP (1) JPS5753049A (en)

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