JPS575372A - Thin film diode and manufacture thereof - Google Patents
Thin film diode and manufacture thereofInfo
- Publication number
- JPS575372A JPS575372A JP7785680A JP7785680A JPS575372A JP S575372 A JPS575372 A JP S575372A JP 7785680 A JP7785680 A JP 7785680A JP 7785680 A JP7785680 A JP 7785680A JP S575372 A JPS575372 A JP S575372A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- thin film
- manufacture
- sputtering method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/125—The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe
- H10F71/1257—The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe comprising growth substrates not made of Group II-VI materials
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE:To readily manufacture a thin film diode and to enhance the reliability and performance of the diode by sequentially laminating a Cd layer, a Te layer and the second electrode layer on the first electrode of an insulating substrate. CONSTITUTION:The first electrode layer 2 of desired shape is formed on a substrate 1 of glass or glazed ceramic or the like. Then, a CdS film 3 is formed by vacuum deposition process or sputtering method or the like. Thereafter, a Te film 4 is formed by vacuum deposition process or sputtering method on the surface formed with the film 3, and a Te layer 4 and a conductive film 5 are further formed thereon by vacuum deposition process or sputtering method or the like. The film 5 forms the second electrode layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7785680A JPS575372A (en) | 1980-06-11 | 1980-06-11 | Thin film diode and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7785680A JPS575372A (en) | 1980-06-11 | 1980-06-11 | Thin film diode and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS575372A true JPS575372A (en) | 1982-01-12 |
Family
ID=13645699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7785680A Pending JPS575372A (en) | 1980-06-11 | 1980-06-11 | Thin film diode and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS575372A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5749264A (en) * | 1980-09-09 | 1982-03-23 | Matsushita Electric Ind Co Ltd | Photoelectric transducer |
| JPH0774372A (en) * | 1994-03-10 | 1995-03-17 | Citizen Watch Co Ltd | Thin film diode and manufacture thereof |
| JPH0774373A (en) * | 1994-03-10 | 1995-03-17 | Citizen Watch Co Ltd | Thin film diode and manufacture thereof |
| JPH0774374A (en) * | 1994-03-10 | 1995-03-17 | Citizen Watch Co Ltd | Thin film diode and manufacture thereof |
| US6603160B1 (en) * | 1998-10-30 | 2003-08-05 | Fujitsu Display Technologies Corporation | MOS capacitor, liquid crystal display, integrated circuit and method of manufacture thereof |
-
1980
- 1980-06-11 JP JP7785680A patent/JPS575372A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5749264A (en) * | 1980-09-09 | 1982-03-23 | Matsushita Electric Ind Co Ltd | Photoelectric transducer |
| JPH0774372A (en) * | 1994-03-10 | 1995-03-17 | Citizen Watch Co Ltd | Thin film diode and manufacture thereof |
| JPH0774373A (en) * | 1994-03-10 | 1995-03-17 | Citizen Watch Co Ltd | Thin film diode and manufacture thereof |
| JPH0774374A (en) * | 1994-03-10 | 1995-03-17 | Citizen Watch Co Ltd | Thin film diode and manufacture thereof |
| US6603160B1 (en) * | 1998-10-30 | 2003-08-05 | Fujitsu Display Technologies Corporation | MOS capacitor, liquid crystal display, integrated circuit and method of manufacture thereof |
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