JPS5753967B2 - - Google Patents
Info
- Publication number
- JPS5753967B2 JPS5753967B2 JP51159187A JP15918776A JPS5753967B2 JP S5753967 B2 JPS5753967 B2 JP S5753967B2 JP 51159187 A JP51159187 A JP 51159187A JP 15918776 A JP15918776 A JP 15918776A JP S5753967 B2 JPS5753967 B2 JP S5753967B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15918776A JPS5383459A (en) | 1976-12-28 | 1976-12-28 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15918776A JPS5383459A (en) | 1976-12-28 | 1976-12-28 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5383459A JPS5383459A (en) | 1978-07-22 |
| JPS5753967B2 true JPS5753967B2 (2) | 1982-11-16 |
Family
ID=15688204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15918776A Granted JPS5383459A (en) | 1976-12-28 | 1976-12-28 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5383459A (2) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51111056A (en) * | 1975-03-26 | 1976-10-01 | Hitachi Ltd | Diffused layer forming method |
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1976
- 1976-12-28 JP JP15918776A patent/JPS5383459A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5383459A (en) | 1978-07-22 |