JPS5759669B2 - - Google Patents
Info
- Publication number
- JPS5759669B2 JPS5759669B2 JP6839975A JP6839975A JPS5759669B2 JP S5759669 B2 JPS5759669 B2 JP S5759669B2 JP 6839975 A JP6839975 A JP 6839975A JP 6839975 A JP6839975 A JP 6839975A JP S5759669 B2 JPS5759669 B2 JP S5759669B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6839975A JPS51144191A (en) | 1975-06-05 | 1975-06-05 | Production method of semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6839975A JPS51144191A (en) | 1975-06-05 | 1975-06-05 | Production method of semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51144191A JPS51144191A (en) | 1976-12-10 |
| JPS5759669B2 true JPS5759669B2 (cs) | 1982-12-15 |
Family
ID=13372569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6839975A Granted JPS51144191A (en) | 1975-06-05 | 1975-06-05 | Production method of semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51144191A (cs) |
-
1975
- 1975-06-05 JP JP6839975A patent/JPS51144191A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51144191A (en) | 1976-12-10 |