JPS5764935A - Method and device for projecting microminiature particles - Google Patents

Method and device for projecting microminiature particles

Info

Publication number
JPS5764935A
JPS5764935A JP55162748A JP16274880A JPS5764935A JP S5764935 A JPS5764935 A JP S5764935A JP 55162748 A JP55162748 A JP 55162748A JP 16274880 A JP16274880 A JP 16274880A JP S5764935 A JPS5764935 A JP S5764935A
Authority
JP
Japan
Prior art keywords
microminiature
projecting
particles
projecting microminiature
microminiature particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55162748A
Other languages
English (en)
Japanese (ja)
Inventor
Haan Eeberuharuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
VEB Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of JPS5764935A publication Critical patent/JPS5764935A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP55162748A 1980-10-01 1980-11-20 Method and device for projecting microminiature particles Pending JPS5764935A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD22425780A DD158197A3 (de) 1980-10-01 1980-10-01 Verfahren und einrichtung zur korpuskularbestrahlung eines targets

Publications (1)

Publication Number Publication Date
JPS5764935A true JPS5764935A (en) 1982-04-20

Family

ID=5526545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55162748A Pending JPS5764935A (en) 1980-10-01 1980-11-20 Method and device for projecting microminiature particles

Country Status (3)

Country Link
JP (1) JPS5764935A (de)
DD (1) DD158197A3 (de)
SU (1) SU1287244A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD225879A3 (de) * 1983-07-01 1985-08-07 Zeiss Jena Veb Carl Verfahren und einrichtung zur korpuskularbestrahlung eines targets

Also Published As

Publication number Publication date
SU1287244A1 (ru) 1987-01-30
DD158197A3 (de) 1983-01-05

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