JPS5765656A - Limited view diffraction image device - Google Patents

Limited view diffraction image device

Info

Publication number
JPS5765656A
JPS5765656A JP55139842A JP13984280A JPS5765656A JP S5765656 A JPS5765656 A JP S5765656A JP 55139842 A JP55139842 A JP 55139842A JP 13984280 A JP13984280 A JP 13984280A JP S5765656 A JPS5765656 A JP S5765656A
Authority
JP
Japan
Prior art keywords
output
diffraction image
adder
signal generating
limited view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55139842A
Other languages
Japanese (ja)
Other versions
JPS6240814B2 (en
Inventor
Hiroyoshi Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55139842A priority Critical patent/JPS5765656A/en
Publication of JPS5765656A publication Critical patent/JPS5765656A/en
Publication of JPS6240814B2 publication Critical patent/JPS6240814B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To improve the view efficiency by obtaining the correction current level synchronous with the current flowing through a deflection lens then lapping said correction current over the current flowing through an electron lens thereby obtaining the limited view diffraction image. CONSTITUTION:The outputs x, y from horizontal and vertical deflection signal generating circuits 11, 12 are amplified by amplifiers 8, 9 then provided to horizontal and vertical deflction lenses 2, 3. At the same time the outputs x, y are squared by square units 19, 20 in a correction signal generating circuit 17 then added by an adder 21. Thereafter said output (x<2>+y<2>) is provided to a multiplier 22 while the output k from a D.C. signal generating circuit 15 is multiplied and the output k(x<2>+y<2>) is provided through a switch 18 to an adder 13. Then the output from the adder 13 where the signal from the circuit 15 is overlapped is amplified and provided to an electron lens 4 to eliminate the spherical astigmatism automatically thereby one point on the specimen 5 can be angular scanned correctly. Consequently the limited view diffraction image can be obtained easily resulting in the improvement of the view efficiency.
JP55139842A 1980-10-08 1980-10-08 Limited view diffraction image device Granted JPS5765656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55139842A JPS5765656A (en) 1980-10-08 1980-10-08 Limited view diffraction image device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55139842A JPS5765656A (en) 1980-10-08 1980-10-08 Limited view diffraction image device

Publications (2)

Publication Number Publication Date
JPS5765656A true JPS5765656A (en) 1982-04-21
JPS6240814B2 JPS6240814B2 (en) 1987-08-31

Family

ID=15254777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55139842A Granted JPS5765656A (en) 1980-10-08 1980-10-08 Limited view diffraction image device

Country Status (1)

Country Link
JP (1) JPS5765656A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050850A (en) * 1983-08-31 1985-03-20 Jeol Ltd Scanning electron microscope
JP2008112748A (en) * 2008-02-04 2008-05-15 Hitachi Ltd Scanning charged particle microscope and astigmatism correction method for scanning charged particle microscope

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63182516U (en) * 1987-05-19 1988-11-24

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945173A (en) * 1982-09-08 1984-03-13 Victor Co Of Japan Ltd Thermotransfer type color printer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945173A (en) * 1982-09-08 1984-03-13 Victor Co Of Japan Ltd Thermotransfer type color printer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050850A (en) * 1983-08-31 1985-03-20 Jeol Ltd Scanning electron microscope
JP2008112748A (en) * 2008-02-04 2008-05-15 Hitachi Ltd Scanning charged particle microscope and astigmatism correction method for scanning charged particle microscope

Also Published As

Publication number Publication date
JPS6240814B2 (en) 1987-08-31

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