JPS5768023A - Mask alignment device - Google Patents

Mask alignment device

Info

Publication number
JPS5768023A
JPS5768023A JP55142891A JP14289180A JPS5768023A JP S5768023 A JPS5768023 A JP S5768023A JP 55142891 A JP55142891 A JP 55142891A JP 14289180 A JP14289180 A JP 14289180A JP S5768023 A JPS5768023 A JP S5768023A
Authority
JP
Japan
Prior art keywords
wafer
lens
mask
light
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55142891A
Other languages
Japanese (ja)
Inventor
Hideki Nishida
Hisao Nozawa
Akira Eda
Koji Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55142891A priority Critical patent/JPS5768023A/en
Publication of JPS5768023A publication Critical patent/JPS5768023A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To obtain a pattern image having high resolution by superposing a light transmission photomask and a wafer coated with a photoresist and providing a device for detecting the light interference fringe produced between the mask and the wafer when the resist is photosensitized through the mask while controlling the relative position of the mask and the wafer. CONSTITUTION:A light condensing lens 1 and a focusing lens 2 are so disposed that the optical axes of the lenses cross perpendicularly, and a half mirror 3 inclined at 45 deg. with respect to the optical axis at the respective main surfaces are arranged at the crossing point of both the optical axes. Au exposure lamp 4 is disposed on the optical axis at the rear of the lens 1, and a film 5 is arranged at the rear of the lens 2. A wafer 7 placing a photomask 6 is disposed at the side where the light passes through the mirror 3. In this manner, the light from the lamp 4 is formed in a parallel beam via the lens 1, and is reflected on the mirror 3, and is exposed with the wafer 7 through the mask 6. At this time the interference fringe produced between the mask 6 and the wafer 7 is projected through the mirror 3 and the lens 2 on the film 5, and the intimate state can be known according to this state.
JP55142891A 1980-10-15 1980-10-15 Mask alignment device Pending JPS5768023A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55142891A JPS5768023A (en) 1980-10-15 1980-10-15 Mask alignment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55142891A JPS5768023A (en) 1980-10-15 1980-10-15 Mask alignment device

Publications (1)

Publication Number Publication Date
JPS5768023A true JPS5768023A (en) 1982-04-26

Family

ID=15325989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55142891A Pending JPS5768023A (en) 1980-10-15 1980-10-15 Mask alignment device

Country Status (1)

Country Link
JP (1) JPS5768023A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0538193A (en) * 1991-07-26 1993-02-12 Tokyo Electric Co Ltd Drive device for stepping motor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0538193A (en) * 1991-07-26 1993-02-12 Tokyo Electric Co Ltd Drive device for stepping motor

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