JPS5771124A - Quartz tube device - Google Patents

Quartz tube device

Info

Publication number
JPS5771124A
JPS5771124A JP14704880A JP14704880A JPS5771124A JP S5771124 A JPS5771124 A JP S5771124A JP 14704880 A JP14704880 A JP 14704880A JP 14704880 A JP14704880 A JP 14704880A JP S5771124 A JPS5771124 A JP S5771124A
Authority
JP
Japan
Prior art keywords
tube
quartz
quartz tube
hook
tube device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14704880A
Other languages
Japanese (ja)
Inventor
Haruo Kumai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14704880A priority Critical patent/JPS5771124A/en
Publication of JPS5771124A publication Critical patent/JPS5771124A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)

Abstract

PURPOSE:To prevent deflection of a quartz tube by mounting a quartz material on the external surface wall of the quartz tube. CONSTITUTION:A SIC-made soaking tube 12 having high heat resisting property is provided on the external circumference of a quartz tube 11 and a groove 12a is formed on the surface of the soaking tube 12. The lower portion of a quartz made hook 13 is welded through the groove 12a to the upper portion of a quartz tube 11. The hook 13 is formed in a T-shape and the upper portion of the hook 13 is positioned in the outside of the tube 12. In such a constitution, if the surface wall of the quartz tube 12 may be softened due to heating, the hook 13 can protect the tube 11 from deflection.
JP14704880A 1980-10-21 1980-10-21 Quartz tube device Pending JPS5771124A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14704880A JPS5771124A (en) 1980-10-21 1980-10-21 Quartz tube device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14704880A JPS5771124A (en) 1980-10-21 1980-10-21 Quartz tube device

Publications (1)

Publication Number Publication Date
JPS5771124A true JPS5771124A (en) 1982-05-01

Family

ID=15421317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14704880A Pending JPS5771124A (en) 1980-10-21 1980-10-21 Quartz tube device

Country Status (1)

Country Link
JP (1) JPS5771124A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913659U (en) * 1972-05-04 1974-02-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913659U (en) * 1972-05-04 1974-02-05

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