JPS5771666A - Apparatus for coating resist - Google Patents

Apparatus for coating resist

Info

Publication number
JPS5771666A
JPS5771666A JP55146505A JP14650580A JPS5771666A JP S5771666 A JPS5771666 A JP S5771666A JP 55146505 A JP55146505 A JP 55146505A JP 14650580 A JP14650580 A JP 14650580A JP S5771666 A JPS5771666 A JP S5771666A
Authority
JP
Japan
Prior art keywords
wafer
resist
gas
plate
substrate plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55146505A
Other languages
English (en)
Inventor
Ryosuke Araki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP55146505A priority Critical patent/JPS5771666A/ja
Publication of JPS5771666A publication Critical patent/JPS5771666A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
JP55146505A 1980-10-20 1980-10-20 Apparatus for coating resist Pending JPS5771666A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55146505A JPS5771666A (en) 1980-10-20 1980-10-20 Apparatus for coating resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55146505A JPS5771666A (en) 1980-10-20 1980-10-20 Apparatus for coating resist

Publications (1)

Publication Number Publication Date
JPS5771666A true JPS5771666A (en) 1982-05-04

Family

ID=15409141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55146505A Pending JPS5771666A (en) 1980-10-20 1980-10-20 Apparatus for coating resist

Country Status (1)

Country Link
JP (1) JPS5771666A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63188940U (ja) * 1987-05-28 1988-12-05

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5337582U (ja) * 1976-09-06 1978-04-01
JPS55165170A (en) * 1979-06-07 1980-12-23 Mitsubishi Electric Corp Application apparatus of resist agent

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5337582U (ja) * 1976-09-06 1978-04-01
JPS55165170A (en) * 1979-06-07 1980-12-23 Mitsubishi Electric Corp Application apparatus of resist agent

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63188940U (ja) * 1987-05-28 1988-12-05

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